JPS6113281U - コ−ルドボツクス - Google Patents

コ−ルドボツクス

Info

Publication number
JPS6113281U
JPS6113281U JP9520484U JP9520484U JPS6113281U JP S6113281 U JPS6113281 U JP S6113281U JP 9520484 U JP9520484 U JP 9520484U JP 9520484 U JP9520484 U JP 9520484U JP S6113281 U JPS6113281 U JP S6113281U
Authority
JP
Japan
Prior art keywords
cold box
temperature valve
outside
low
cold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9520484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328281Y2 (enrdf_load_stackoverflow
Inventor
成人 河村
孝三 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9520484U priority Critical patent/JPS6113281U/ja
Publication of JPS6113281U publication Critical patent/JPS6113281U/ja
Application granted granted Critical
Publication of JPH0328281Y2 publication Critical patent/JPH0328281Y2/ja
Granted legal-status Critical Current

Links

JP9520484U 1984-06-27 1984-06-27 コ−ルドボツクス Granted JPS6113281U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9520484U JPS6113281U (ja) 1984-06-27 1984-06-27 コ−ルドボツクス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9520484U JPS6113281U (ja) 1984-06-27 1984-06-27 コ−ルドボツクス

Publications (2)

Publication Number Publication Date
JPS6113281U true JPS6113281U (ja) 1986-01-25
JPH0328281Y2 JPH0328281Y2 (enrdf_load_stackoverflow) 1991-06-18

Family

ID=30654213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9520484U Granted JPS6113281U (ja) 1984-06-27 1984-06-27 コ−ルドボツクス

Country Status (1)

Country Link
JP (1) JPS6113281U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561534A (en) * 1979-06-15 1981-01-09 Nec Corp Manufacture of photomask

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561534A (en) * 1979-06-15 1981-01-09 Nec Corp Manufacture of photomask

Also Published As

Publication number Publication date
JPH0328281Y2 (enrdf_load_stackoverflow) 1991-06-18

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