JPS61132816A - Numerical control device - Google Patents

Numerical control device

Info

Publication number
JPS61132816A
JPS61132816A JP25399184A JP25399184A JPS61132816A JP S61132816 A JPS61132816 A JP S61132816A JP 25399184 A JP25399184 A JP 25399184A JP 25399184 A JP25399184 A JP 25399184A JP S61132816 A JPS61132816 A JP S61132816A
Authority
JP
Japan
Prior art keywords
displacement meter
workpiece
minute displacement
amount
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25399184A
Other languages
Japanese (ja)
Inventor
Kazuhiko Nagayama
永山 和彦
Masami Masuda
正美 桝田
Yukio Maeda
幸男 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP25399184A priority Critical patent/JPS61132816A/en
Publication of JPS61132816A publication Critical patent/JPS61132816A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To raise the accuracy and the reliability by extracting selectively a side quantity from an inclination of a free curved surface in a measuring point and a contact pressure of a displacement gauge, and correcting a read value by a red error calculated from its slide quantity. CONSTITUTION:When measuring a shape of an object to be worked 3 which has been worked by a tool 6, a contact pressure of a micro-displacement gauge 11, a correlative data of a component force and a slide quantity in the X axis direction of the contact pressure of its displacement gauge 11, and a free curved surface constant are inputted in advance to an external storage device 14 from a keyboard 16. In this state, the micro-displacement gauge 11 is positioned at an optional measuring point, and thereafter, a displacement quantity is inputted, and also a process for correcting the input value by a quantity corresponding to the slide quantity is repeated in an optional deciding range.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、自由曲面を有する被加工物の形状を、接触式
の変位形で計測する機能を有する数値制御装置に係り、
さらに詳しくは、旋盤、マシニングセンタ及び三次元測
定器などのような機器において、自由曲面形状を備える
被加工物(被測定物)の形状精度を計測する数値制御装
置に関するものである。
[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a numerical control device having a function of measuring the shape of a workpiece having a free-form surface using a contact type displacement type.
More specifically, the present invention relates to a numerical control device that measures the shape accuracy of a workpiece (object to be measured) having a free-form surface shape in equipment such as a lathe, a machining center, and a three-dimensional measuring device.

〔発明の背景〕[Background of the invention]

この種の数値制御による旋盤装置として、第4図に示す
ような構成のものが公知である(特開昭59−1420
45号公報)。同構成は、本出願人が開発したものであ
る。
As a lathe device using numerical control of this type, one having a configuration as shown in FIG.
Publication No. 45). This configuration was developed by the applicant.

第4図の数値制御旋盤において、1は加工機本体、2は
被加工物3を把持するチャック、4はXZテーブル、5
は工具台、6は切削加工用の工具、7a、7bはXZ子
テーブル動用のモータ、7cはチャック2を矢印入方向
に駆動するためのモータである。また、11は工具台5
に取付けられた接触型の検出器、12は検出器11での
検出出力信号を増幅する増幅回路、13はアナログ信号
をディジタル信号゛に変換するA/D変換器である。
In the numerically controlled lathe shown in Fig. 4, 1 is the processing machine main body, 2 is a chuck that grips the workpiece 3, 4 is an XZ table, and 5 is a
6 is a tool stand, 6 is a cutting tool, 7a and 7b are motors for moving the XZ child table, and 7c is a motor for driving the chuck 2 in the direction indicated by the arrow. Also, 11 is a tool stand 5
12 is an amplifier circuit for amplifying the detection output signal from the detector 11, and 13 is an A/D converter for converting an analog signal into a digital signal.

また、8はNC制御装置を示し、NCテープ9のデータ
を読取るテープ読取部81と、演算処理装置82と、制
御部83と、アンプ84a、 84b、 84cと、検
出器11での検出データを演算処理装置82に入力する
データ入力部85と、演算処理装置82の出力データを
外部表示器(CRT)15に表示制御するための外部表
示器制御部87とから成っている。
Further, 8 indicates an NC control device, which includes a tape reading section 81 that reads data from the NC tape 9, an arithmetic processing device 82, a control section 83, amplifiers 84a, 84b, 84c, and detecting data from the detector 11. It consists of a data input section 85 for inputting data to the arithmetic processing device 82 and an external display control section 87 for controlling the display of output data from the arithmetic processing device 82 on an external display (CRT) 15 .

同構成は、接触型検出器11をxZ方向に同時2軸制御
することによって被加工物3を測定する場合のものであ
る。すなわち、工具6で加工した被加工物3の自由曲面
形状を計測すべく、測定用制御指令情報が記憶されたN
Cテープ9からの指令によって各駆動用モータ7a、7
bを駆動することによりxZ子テーブルを任意に駆動し
て、各測定点における微小変位計11の変位量を演算処
理装置82で読取り、形状誤差を算出するように構成さ
れている。
This configuration is for measuring the workpiece 3 by simultaneously controlling the contact type detector 11 in two axes in the x and Z directions. That is, in order to measure the free-form surface shape of the workpiece 3 machined with the tool 6, the measurement control command information is stored in the N
Each drive motor 7a, 7 is activated by a command from the C tape 9.
By driving b, the xZ child table is arbitrarily driven, and the arithmetic processing unit 82 reads the amount of displacement of the minute displacement meter 11 at each measurement point, and calculates the shape error.

第2図は、第4図の微小変位計11における滑り状況を
説明した図であって、微小変位計11により、任意の測
定点Piにおける形状を測定する場合について述べると
次のとおりである。
FIG. 2 is a diagram illustrating the slipping situation in the minute displacement meter 11 of FIG. 4, and the case where the shape at an arbitrary measurement point Pi is measured by the minute displacement meter 11 will be described as follows.

すなわち、微小変位計11の触圧によって、変位計本体
またはその変位計を支持する機構部が点P′i方向に滑
りを生じる。したがって、第1図に示す演算処理装置8
2は、点Piにおける計測情報として判断するから、前
記中央処理装置82が読み取った変位量には変位計の滑
りによる誤差ΔZiが含まれるという問題があった。こ
の滑りによる誤差AZiは前記微小変位計11の触圧の
大きさおよび測定点における自由曲面の傾きに比例して
大きくなるものである。
That is, the tactile pressure of the minute displacement meter 11 causes the displacement meter body or the mechanism supporting the displacement meter to slip in the direction of point P'i. Therefore, the arithmetic processing device 8 shown in FIG.
2 is judged as measurement information at point Pi, so there is a problem that the displacement amount read by the central processing unit 82 includes an error ΔZi due to slippage of the displacement meter. The error AZi due to this slippage increases in proportion to the magnitude of the contact pressure of the minute displacement meter 11 and the inclination of the free-form surface at the measurement point.

なお、第3図は第4図に示す装置での滑り量ΔXiを変
位計触圧のX軸方向分力Fxの大きさ毎にプロットした
ものである。なお、第3図からも明らかなように、前記
問題点を排除すべく微小変位計11の触圧をIgf以下
にする必要があるが、このような変位計は極めて高価な
ものとなり、得策ではない。
In addition, FIG. 3 is a graph in which the amount of slip ΔXi in the apparatus shown in FIG. 4 is plotted for each magnitude of the X-axis direction component force Fx of the displacement meter tactile pressure. As is clear from Fig. 3, in order to eliminate the above-mentioned problem, it is necessary to reduce the contact pressure of the minute displacement meter 11 to less than Igf, but such a displacement meter is extremely expensive and is not a good idea. do not have.

〔発明の目的〕[Purpose of the invention]

本発明は前記した従来技術における問題点に鑑みなされ
たものであって、計測精度が向上し、かつ安価な変位計
で構成でき、自動化を考慮した数値制御装置を提供する
ことを目的とする。
The present invention has been made in view of the problems in the prior art described above, and it is an object of the present invention to provide a numerical control device that improves measurement accuracy, can be configured with an inexpensive displacement meter, and is compatible with automation.

〔発明の概要〕[Summary of the invention]

前記目的を達成するために、本発明は、予め数値制御装
置における変位計触圧のX軸方向分力と滑り量とを測定
し、その測定値を記憶しておき。
In order to achieve the above object, the present invention measures in advance the X-axis direction component of the displacement meter contact pressure and the slip amount in a numerical control device, and stores the measured values.

任意の測定点における被加工物の自由曲面の傾きと使用
している微小変位計の触圧より変位計触圧のX軸分力(
Fx)を算出し、その計算結果と前記記憶結果とを比較
し、その比較結果から滑り量を求め、その滑り量をもと
に計測値を補正するように構成したものである。
From the inclination of the free-form surface of the workpiece at any measurement point and the tactile pressure of the minute displacement meter used, the X-axis component force of the tactile pressure of the displacement meter (
Fx), the calculated result is compared with the stored result, the amount of slip is determined from the comparison result, and the measured value is corrected based on the amount of slip.

〔発明の実施例〕[Embodiments of the invention]

以下、第1図に従って本発明の一実施例を詳述する。 Hereinafter, one embodiment of the present invention will be described in detail with reference to FIG.

(実施例1) 第1図において、第4図と同一符号を付しであるものは
同一機能を有するものである。第1図においては、被加
工物断面の非球面定数、微小変位計の触圧および微小変
位計のX軸方向分力と滑り量との相関データ等を登録し
ている外部記憶装置14と、相関データ等を入力、指示
するキーボード16と、外部記憶装置制御部86と、キ
ーボード情報入力回路88が追加設置しである。
(Embodiment 1) In FIG. 1, the same reference numerals as in FIG. 4 have the same functions. In FIG. 1, there is an external storage device 14 that stores correlation data between the aspherical constant of the cross section of the workpiece, the contact pressure of the minute displacement meter, the X-axis component force of the minute displacement meter, and the slip amount, etc. A keyboard 16 for inputting and instructing correlation data, etc., an external storage device control section 86, and a keyboard information input circuit 88 are additionally installed.

すなわち、第1図においては、工具6と接触型の微小変
位計11とが、工具台5に固定されている。
That is, in FIG. 1, the tool 6 and the contact-type minute displacement meter 11 are fixed to the tool stand 5. As shown in FIG.

更にその工具台5は、テーブル駆動モータ7a。Further, the tool stand 5 has a table drive motor 7a.

7bによってそれぞれZ、X軸方向に移動せしめられる
xZ子テーブルの上面に固定されている。
7b is fixed to the upper surface of the xZ child table which can be moved in the Z and X axis directions, respectively.

そのxZ子テーブルは加工機本体1に設置されている。The xZ child table is installed in the processing machine main body 1.

また、加工機本体1には、その軸心が2軸と平行になる
ように被加工物3がチャック2に取付けられている。
Further, a workpiece 3 is attached to a chuck 2 in the processing machine main body 1 so that its axis is parallel to two axes.

なお、本例の前記微小変位計11からの出力信号は増幅
回路12で増幅され、更にA/D変換回路13でディジ
タル信号に変換されるようになっている。
Note that the output signal from the minute displacement meter 11 in this example is amplified by an amplifier circuit 12 and further converted into a digital signal by an A/D conversion circuit 13.

他方、機上計測を行うための微小変位計11の軌跡指令
は予め制御指令テープ9にプログラムされており、この
制御指令テープ9からの情報を読み取るとともにテーブ
ル駆動モータ7a、7bおよびスピンドル駆動モータ7
cを制御するための数値制御装置8が設置されている。
On the other hand, the trajectory command of the minute displacement meter 11 for performing on-machine measurement is programmed in advance on the control command tape 9, and the information from this control command tape 9 is read and the table drive motors 7a, 7b and spindle drive motor 7 are
A numerical control device 8 is installed to control c.

この数値制御装置8は、被加工物断面の非球面定数、微
小変位計の触圧および微小変位計のX軸方向分力と滑り
量との相関データ等を記憶している外部記憶装置(FD
)14の情報を読み取るための外部記憶装置制御部86
と、形状誤差解析処理結果等を出力するプリンタまたは
CRT外部表示器15へ情報を出力する外部表示器制御
部87と、前記制御指令テープ9の。
This numerical control device 8 is connected to an external storage device (FD
)14 external storage device control unit 86 for reading the information of 14
, an external display controller 87 that outputs information to the printer or CRT external display 15 that outputs shape error analysis processing results, etc., and the control command tape 9.

情報を読み取るためのテープ読取部81と、該テープ読
取部81が読み取った情報に基づいてxz子テーブルを
移動せしめるための指令を出力するとともに後述の計測
値補正処理及びその補正処理の基礎情報を成す滑り補正
マツプ作成等の演算処理を行う演算処理部82と、該演
算処理部82からの出力指令に基づきxZ子テーブルお
よび先端に被加工物3を具備したスピンドル(図示せず
)を駆動せしめるそれぞれの駆動モータ7a、7b、7
cを駆動制御するための制御部83と、該制御部83か
らの出力信号を前記駆動モータ7a〜7Cの駆動信号に
増幅、変換するためのアンプ部84a〜84cと、前記
A/D変換回路13から出力されるデータ情報を入力し
、結果を前記演算処理部82八出力するためのデータ入
力部85と、前記微小変位計11の触圧及び予め測定し
た本機における微小変位計触圧のX軸方向分力と滑り量
との相関データ等を指示するキーボード16からのキー
イン情報を読み取るキーボード情報入力回路88から成
っている。
A tape reading section 81 for reading information, and outputting a command for moving the xz child table based on the information read by the tape reading section 81, as well as basic information for measurement value correction processing and the correction processing, which will be described later. An arithmetic processing unit 82 performs arithmetic processing such as creating a slip correction map, and an xZ child table and a spindle (not shown) equipped with a workpiece 3 at the tip are driven based on output commands from the arithmetic processing unit 82. Respective drive motors 7a, 7b, 7
a control section 83 for controlling the drive of the drive motors 7a to 7C; a data input section 85 for inputting the data information output from the arithmetic processing section 13 and outputting the results from the arithmetic processing section 828; It consists of a keyboard information input circuit 88 that reads key-in information from the keyboard 16 indicating correlation data between the component force in the X-axis direction and the amount of slip.

いま、工具6で加工した後の被加工物3の形状を計測す
るに当り、微小変位計11の触圧、その変位計11の触
圧のX軸方向の分力と滑り量の相関データ及び自由曲面
定数を予めキーボード16より外、部記憶装置14に入
力しておく。NCテープ9からの計測制御指令によりx
Z子テーブルを駆動せしめて、前記微小変位計11を前
記第2図の点Piに位置決め制御し、変位量Ω′iを入
力する。ここで、入力した変位量a′は滑りを起した点
P′iを計測した値であるために、次のような補正を行
う。
Now, in order to measure the shape of the workpiece 3 after machining with the tool 6, the contact pressure of the minute displacement meter 11, the correlation data between the component force in the X-axis direction of the contact pressure of the displacement meter 11 and the slip amount, and Free-form surface constants are input in advance into the external storage device 14 from the keyboard 16. x due to measurement control command from NC tape 9
The Z table is driven to position the minute displacement meter 11 at the point Pi in FIG. 2, and the displacement Ω'i is input. Here, since the input displacement amount a' is a value measured at the point P'i where the slippage occurred, the following correction is performed.

すなわち、一般的にF (X)で表わせる自由曲面の点
Pi (Xi、 Zi)における傾きは一次微分式F′
(Xi)の逆正接(θi = tan”” (F ’ 
(Xi) ))で求めることができるので、点Piにお
ける微小変位計触圧のX軸方向分力FXiは F Xi = tanθiF =tan(tan−’(
F’(Xi)))・F=F’(Xi)・F      
・・・・・・・・・(1)である。ここで、F:微小変
位計の触圧(gf)そこで、予め入力しておいた前記微
小変位計触圧のX軸方向分力と滑り量との相関データよ
り。
In other words, the slope at point Pi (Xi, Zi) of a free-form surface generally expressed as F (X) is expressed by the first-order differential equation F'
Arctangent of (Xi) (θi = tan""(F'
(Xi) )), the X-axis direction component force FXi of the minute displacement meter contact pressure at point Pi is F Xi = tanθiF = tan(tan-'(
F'(Xi))・F=F'(Xi)・F
......(1). Here, F: tactile pressure of the minute displacement meter (gf) From the correlation data between the force in the X-axis direction of the tactile pressure of the minute displacement meter and the amount of slip, which was input in advance.

前記分力FXiのときの滑り量ΔXiを抽出し、次のよ
うに計測値の補正を行う。
The slip amount ΔXi at the time of the component force FXi is extracted, and the measured value is corrected as follows.

すなわち、真の計測値Qiは Ωi=Q’i+Δ2        ・・・・・・(2
)ここで ΔZi=tan θ・AXi = F ’ (Xi) 
・AXi   ・・・(3)で近似できるので、(式2
)(式3)よりMi= Q’i’+ F’(Xi) ・
AXi    −−(4)となる。
In other words, the true measured value Qi is Ωi=Q'i+Δ2 (2
) where ΔZi=tan θ・AXi=F' (Xi)
・AXi ... Since it can be approximated by (3), (Equation 2
) (Formula 3), Mi=Q'i'+F'(Xi) ・
AXi --(4).

このように、任意の測定点に微小変位計を位置決めした
後、変位量を入力し、更に入力値を滑り量に相応した量
だけ補正するプロセスを任意の判定範囲で繰返す。
In this way, after positioning the minute displacement meter at an arbitrary measurement point, the process of inputting the amount of displacement and correcting the input value by an amount corresponding to the amount of slip is repeated in an arbitrary determination range.

本実施例によれば1位置決め直後の微小変位計の変位置
から、変位計が滑ることによって生じた読み取り誤差を
補正するようにしたため、高精度な計測が、できる効果
が得られる。
According to this embodiment, since the reading error caused by the displacement meter slipping is corrected from the position of the minute displacement meter immediately after the first positioning, highly accurate measurement can be achieved.

(実施例2) 実施例1では、生じた滑り量から読み取り誤差を算出し
て、実際の読み取り値から補正する場合について述べた
が、本実施例では、(1)式により微小変位計触圧のX
軸方向分力FXiを求め、予め入力しておいた微小変位
計触圧のX軸方向分力と滑り量との相関データより、前
記分力FXiのときの滑り量ΔXiを抽出し、次のよう
に測定点座標の補正を行う。すなわち、 X1=Xi−AXi Zi=F(X’i)+1’1=F(Xi−AXi)−1
11’i  =45)したがって、t′iにおける理想
的な自由曲面形状と(5)式で求められた測定点座標を
比較することにより、形状誤差を求めることができる。
(Example 2) In Example 1, a case was described in which the reading error was calculated from the amount of slippage that occurred and was corrected from the actual reading value. X of
Find the axial component force FXi, and extract the slip amount ΔXi when the component force FXi is the same from the correlation data between the X-axis component of the small displacement meter tactile pressure and the slip amount, which was input in advance. Correct the measurement point coordinates as follows. That is, X1=Xi-AXi Zi=F(X'i)+1'1=F(Xi-AXi)-1
11'i = 45) Therefore, the shape error can be determined by comparing the ideal free-form surface shape at t'i with the measurement point coordinates determined by equation (5).

本実施例によれば、滑りを生じた点で理想的な自由曲面
形状と比較するようにしたため、高精度な形状計測がで
きる効果が得られる。
According to this embodiment, since the points at which slipping occurs are compared with the ideal free-form surface shape, the effect of highly accurate shape measurement can be obtained.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明によれば、数値制御装置で
自由曲面形状を有する被加工物(または被測定物)を接
触式の微小変位計を用いて計測するに当り、予め測定し
、記憶した微小変位計と滑り量との相関データを基に、
測定点における自由曲面の傾きと変位計の触圧より選択
的に滑り量を抽出し、その滑り量から読み取り誤差を算
出し、その誤差を読み取り値から排除するようにしたた
め、極めて高精度で信頼性の高い形状測定ができる効果
がある。しかも、特別高精度な変位計を用いる必要がな
いため安価な計測システムが構成できる効果もある。
As explained above, according to the present invention, when measuring a workpiece (or object to be measured) having a free-form surface shape with a numerical control device using a contact-type micro-displacement meter, measurement is performed in advance and stored. Based on the correlation data between the minute displacement meter and the amount of slip,
The amount of slip is selectively extracted from the inclination of the free-form surface at the measurement point and the contact pressure of the displacement meter, the reading error is calculated from the amount of slip, and that error is eliminated from the reading value, resulting in extremely high accuracy and reliability. This has the effect of allowing highly accurate shape measurement. Moreover, since there is no need to use a particularly high-precision displacement meter, an inexpensive measurement system can be constructed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す数値制御装置の概略的
構成図、第2図は微小変位計の滑り状況を説明した図、
第3図は変位計触圧のX軸方向分力を説明するための特
性図、第4図は本出願人が先に開発した数値制御装置の
概略的構成図である。 1・・・加工機本体、2・・・チャック、3・・・被加
工物。 4・・・xZ子テーブル5・・・工具台、6・・・工具
、 7a〜7c・・・テーブル駆動モータ、8・・・数
値制御装置、9・・・NGテープ、11・・・微小変位
計、12・・・増幅回路、13・・・AD変換回路、1
4・・・外部記憶装置、15・・・外部表示器、16・
・・キーボード、81・・・テープ読取部、82・・・
演算処理装置、83・・・制御部、84a〜84c・・
・アンプ部、85・・・データ入力部、86・・・外部
記憶装置制御部、87・・・外部表示器制御部、88・
・・キーボード情報入力回路・ 代理人  弁理士   秋 本  正 実第1図 第2図 Zi          Z 第3図 第4図
Fig. 1 is a schematic configuration diagram of a numerical control device showing an embodiment of the present invention, Fig. 2 is a diagram illustrating the slipping situation of a minute displacement meter,
FIG. 3 is a characteristic diagram for explaining the X-axis component force of the displacement meter contact pressure, and FIG. 4 is a schematic configuration diagram of a numerical control device previously developed by the applicant. 1... Processing machine main body, 2... Chuck, 3... Workpiece. 4...xZ child table 5...tool stand, 6...tool, 7a-7c...table drive motor, 8...numerical control device, 9...NG tape, 11...micro Displacement meter, 12... Amplification circuit, 13... AD conversion circuit, 1
4... External storage device, 15... External display, 16.
...Keyboard, 81...Tape reading unit, 82...
Arithmetic processing unit, 83...control unit, 84a-84c...
- Amplifier section, 85... Data input section, 86... External storage device control section, 87... External display control section, 88.
・・Keyboard information input circuit・ Agent Masaaki Akimoto, Patent Attorney Figure 1 Figure 2 Zi Z Figure 3 Figure 4

Claims (1)

【特許請求の範囲】[Claims] 被加工物(または被測定物)の変位を検出する微小変位
計を用いて、前記被加工物の自由曲面の形状精度を、少
なくとも2軸移動可能なテーブル上で計測する数値制御
装置において、前記微小変位計の触圧、その変位計の触
圧のX軸方向の分力と滑り量の相関データ、および自由
曲面定数等の情報を指示、入力する入力手段と、前記情
報を予め記憶しておき、前記入力手段によって読み出し
制御される外部記憶手段と、自由曲面形状を形成する被
加工物、または前記微小変位計のうち、少なくともいず
れか一方を位置決め制御する制御手段と、前記被加工物
の断面形状を計測可能とした形状検出手段と、該検出手
段から得られたデータから検出誤差を排除処理する演算
処理手段とを具備して成り、前記制御手段が、被加工物
の任意の測定点に前記微小変位計を位置決めしたときの
、その微小変位計の滑り量を求めると共に、該滑り量に
対応した検出誤差を算出し、該検出誤差を前記検出手段
から得られたデータより排除することによって被加工物
の形状精度を計測する数値制御装置。
In the numerical control device that measures the shape accuracy of a free-form surface of the workpiece on a table movable in at least two axes using a minute displacement meter that detects the displacement of the workpiece (or the object to be measured), input means for instructing and inputting information such as the tactile pressure of the minute displacement meter, the correlation data between the component force in the X-axis direction of the tactile pressure of the displacement meter and the slip amount, and the free-form surface constant; an external storage means whose reading is controlled by the input means; a control means which controls the positioning of at least one of a workpiece forming a free-form surface shape or the minute displacement meter; It is equipped with a shape detection means capable of measuring a cross-sectional shape, and an arithmetic processing means for eliminating detection errors from the data obtained from the detection means, and the control means is configured to detect a measurement point at an arbitrary measurement point on the workpiece. determining the amount of slippage of the minute displacement meter when positioning the minute displacement meter, calculating a detection error corresponding to the amount of slippage, and eliminating the detection error from the data obtained from the detection means. A numerical control device that measures the shape accuracy of the workpiece.
JP25399184A 1984-12-03 1984-12-03 Numerical control device Pending JPS61132816A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25399184A JPS61132816A (en) 1984-12-03 1984-12-03 Numerical control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25399184A JPS61132816A (en) 1984-12-03 1984-12-03 Numerical control device

Publications (1)

Publication Number Publication Date
JPS61132816A true JPS61132816A (en) 1986-06-20

Family

ID=17258745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25399184A Pending JPS61132816A (en) 1984-12-03 1984-12-03 Numerical control device

Country Status (1)

Country Link
JP (1) JPS61132816A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03111701A (en) * 1989-09-26 1991-05-13 Olympus Optical Co Ltd Method and apparatus for measuring workpiece

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03111701A (en) * 1989-09-26 1991-05-13 Olympus Optical Co Ltd Method and apparatus for measuring workpiece

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