JPS61132709U - - Google Patents
Info
- Publication number
- JPS61132709U JPS61132709U JP1689885U JP1689885U JPS61132709U JP S61132709 U JPS61132709 U JP S61132709U JP 1689885 U JP1689885 U JP 1689885U JP 1689885 U JP1689885 U JP 1689885U JP S61132709 U JPS61132709 U JP S61132709U
- Authority
- JP
- Japan
- Prior art keywords
- curvature
- points
- measuring
- change
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004364 calculation method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1689885U JPS61132709U (fr) | 1985-02-08 | 1985-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1689885U JPS61132709U (fr) | 1985-02-08 | 1985-02-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61132709U true JPS61132709U (fr) | 1986-08-19 |
Family
ID=30504099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1689885U Pending JPS61132709U (fr) | 1985-02-08 | 1985-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61132709U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008116354A (ja) * | 2006-11-06 | 2008-05-22 | Nec Electronics Corp | 反り測定システム、成膜システム、及び反り測定方法 |
-
1985
- 1985-02-08 JP JP1689885U patent/JPS61132709U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008116354A (ja) * | 2006-11-06 | 2008-05-22 | Nec Electronics Corp | 反り測定システム、成膜システム、及び反り測定方法 |