JPS61132709U - - Google Patents

Info

Publication number
JPS61132709U
JPS61132709U JP1689885U JP1689885U JPS61132709U JP S61132709 U JPS61132709 U JP S61132709U JP 1689885 U JP1689885 U JP 1689885U JP 1689885 U JP1689885 U JP 1689885U JP S61132709 U JPS61132709 U JP S61132709U
Authority
JP
Japan
Prior art keywords
curvature
points
measuring
change
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1689885U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1689885U priority Critical patent/JPS61132709U/ja
Publication of JPS61132709U publication Critical patent/JPS61132709U/ja
Pending legal-status Critical Current

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  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例を示す正面図、第2
図はその右側面図、第3図は第1図のものの回路
構成を示すブロツク図、第4図は第1図のものの
演算方法を説明するための要部拡大図、第5図は
本考案の他の実施例を示す正面図、第6図は従来
の三次元測定機を示す正面図、第7図は従来の三
点式曲率測定機を示す正面図である。 1……測定機本体、2,3……固定測定子、4
……被測定物、5,6……可動測定子、7……演
算部、8……表示部、O,O,A,B……接
触点。
Figure 1 is a front view showing one embodiment of the present invention;
The figure is its right side view, Figure 3 is a block diagram showing the circuit configuration of the one in Figure 1, Figure 4 is an enlarged view of the main part of the one in Figure 1 to explain the calculation method, and Figure 5 is the present invention. FIG. 6 is a front view showing a conventional three-dimensional measuring machine, and FIG. 7 is a front view showing a conventional three-point curvature measuring machine. 1... Measuring device main body, 2, 3... Fixed measuring head, 4
...Object to be measured, 5, 6...Movable measuring element, 7...Calculating section, 8...Display section, O1 , O2 , A, B...Contact point.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 測定機本体の下面に固定された二本の固定測定
子と、前記測定機本体の下面に前記両固定測定子
と同一直線上にて上下動可能に設けられた二本以
上の可動測定子と、これら四本以上の測定子が接
触する被測定面の四つ以上の接触点のうち任意な
三点を二通り選び、この二通りについて該三点を
通る円弧の曲率を演算してその変化率を求める演
算部と、該演算部で求められた曲率の変化率を表
示する表示部とからなる曲率変化率測定機。
Two fixed measuring elements fixed to the lower surface of the measuring machine body, and two or more movable measuring elements provided on the lower surface of the measuring machine body so as to be movable up and down in the same straight line as the fixed measuring elements. , select two arbitrary three points from among the four or more contact points of the surface to be measured that these four or more contact points come into contact with, calculate the curvature of the circular arc passing through the three points for these two ways, and calculate the change. A curvature change rate measuring device comprising a calculation unit that calculates the ratio, and a display unit that displays the rate of change in curvature determined by the calculation unit.
JP1689885U 1985-02-08 1985-02-08 Pending JPS61132709U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1689885U JPS61132709U (en) 1985-02-08 1985-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1689885U JPS61132709U (en) 1985-02-08 1985-02-08

Publications (1)

Publication Number Publication Date
JPS61132709U true JPS61132709U (en) 1986-08-19

Family

ID=30504099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1689885U Pending JPS61132709U (en) 1985-02-08 1985-02-08

Country Status (1)

Country Link
JP (1) JPS61132709U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008116354A (en) * 2006-11-06 2008-05-22 Nec Electronics Corp Warpage measurement system, film formation system, and warpage measurement method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008116354A (en) * 2006-11-06 2008-05-22 Nec Electronics Corp Warpage measurement system, film formation system, and warpage measurement method

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