JPS61131829U - - Google Patents

Info

Publication number

JPS61131829U

JPS61131829U JP1462185U JP1462185U JPS61131829U JP S61131829 U JPS61131829 U JP S61131829U JP 1462185 U JP1462185 U JP 1462185U JP 1462185 U JP1462185 U JP 1462185U JP S61131829 U JPS61131829 U JP S61131829U

Authority

JP

Japan

Prior art keywords

metal film

semiconductor integrated

aluminum

ion implantation

modifying

Prior art date

1985-02-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims description 4
• 238000005468 ion implantation Methods 0.000 claims description 2
• 238000004519 manufacturing process Methods 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 229910052751 metal Inorganic materials 0.000 claims 3
• 239000002184 metal Substances 0.000 claims 3
• 238000000034 method Methods 0.000 claims 3
• 229910052782 aluminium Inorganic materials 0.000 claims 2
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
• 238000000151 deposition Methods 0.000 claims 1
• 229910000838 Al alloy Inorganic materials 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1