JPS61131175U - - Google Patents

Info

Publication number
JPS61131175U
JPS61131175U JP1985014049U JP1404985U JPS61131175U JP S61131175 U JPS61131175 U JP S61131175U JP 1985014049 U JP1985014049 U JP 1985014049U JP 1404985 U JP1404985 U JP 1404985U JP S61131175 U JPS61131175 U JP S61131175U
Authority
JP
Japan
Prior art keywords
axis
reflecting surfaces
lens
camera
defect inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985014049U
Other languages
English (en)
Other versions
JPH0411415Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985014049U priority Critical patent/JPH0411415Y2/ja
Priority to US06/776,892 priority patent/US4664520A/en
Priority to DE8585306844T priority patent/DE3581870D1/de
Priority to EP85306844A priority patent/EP0177273B1/en
Publication of JPS61131175U publication Critical patent/JPS61131175U/ja
Application granted granted Critical
Publication of JPH0411415Y2 publication Critical patent/JPH0411415Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Optical Systems Of Projection Type Copiers (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Closed-Circuit Television Systems (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例を示す水平断面図、第
２図はその垂直断面図、第３図はそのシステム構
成図、第４図は本考案の欠陥検査用カメラの使用
状態を示す一部切欠斜視図、第５図は各撮像素子
の出力信号及びその差信号の波形図、第６図、第
７図、第８図は直線撮像素子の感度特性の変動パ
ターンとそれに対応する光量加減フイルタを示す
模式図である。 ２：レンズ、３：反射鏡、６：稜線、７，８：
反射面、９，１０：直線撮像素子、１１：光量加
減フイルタ、ｌ：レンズ２の軸線。

Claims (1)

    【実用新案登録請求の範囲】
  1. レンズ２の軸線ｌ上に該軸線ｌに直交する稜線
    ６を挟んで軸線ｌに対して等角度に傾斜する対称
    な２つの反射面７，８を持つ反射鏡３を取付ける
    とともに、これらの反射面７，８からの反射光を
    受けるカメラ内面上の２位置には、少なくとも一
    方の前面に画素の配列方向への感度特性の変動パ
    ターンに対応する濃度分布を持つ光量加減フイル
    タ１１が付設された直線撮像素子９，１０を配し
    たことを特徴とする欠陥検査用カメラ。
JP1985014049U 1984-09-29 1985-02-01 Expired JPH0411415Y2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1985014049U JPH0411415Y2 (ja) 1985-02-01 1985-02-01
US06/776,892 US4664520A (en) 1984-09-29 1985-09-17 Camera for visual inspection
DE8585306844T DE3581870D1 (de) 1984-09-29 1985-09-26 Kamera zur optischen untersuchung.
EP85306844A EP0177273B1 (en) 1984-09-29 1985-09-26 Camera for visual inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985014049U JPH0411415Y2 (ja) 1985-02-01 1985-02-01

Publications (2)

Publication Number Publication Date
JPS61131175U true JPS61131175U (ja) 1986-08-16
JPH0411415Y2 JPH0411415Y2 (ja) 1992-03-23

Family

ID=30498613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985014049U Expired JPH0411415Y2 (ja) 1984-09-29 1985-02-01

Country Status (1)

Country Link
JP (1) JPH0411415Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011017633A (ja) * 2009-07-09 2011-01-27 Jfe Steel Corp 表面欠陥検査装置の照度安定機構

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS447278Y1 (ja) * 1965-06-14 1969-03-18
JPS4964485A (ja) * 1972-10-20 1974-06-21
JPS50156890A (ja) * 1974-06-06 1975-12-18
JPS5322A (en) * 1976-06-23 1978-01-05 Fujitsu Ltd Solid pickup unit
JPS5552278A (en) * 1978-10-13 1980-04-16 Fujitsu Ltd Solid image pickup device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS447278Y1 (ja) * 1965-06-14 1969-03-18
JPS4964485A (ja) * 1972-10-20 1974-06-21
JPS50156890A (ja) * 1974-06-06 1975-12-18
JPS5322A (en) * 1976-06-23 1978-01-05 Fujitsu Ltd Solid pickup unit
JPS5552278A (en) * 1978-10-13 1980-04-16 Fujitsu Ltd Solid image pickup device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011017633A (ja) * 2009-07-09 2011-01-27 Jfe Steel Corp 表面欠陥検査装置の照度安定機構

Also Published As

Publication number Publication date
JPH0411415Y2 (ja) 1992-03-23

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