JPS6113101A - 送り機構 - Google Patents

送り機構

Info

Publication number
JPS6113101A
JPS6113101A JP59132914A JP13291484A JPS6113101A JP S6113101 A JPS6113101 A JP S6113101A JP 59132914 A JP59132914 A JP 59132914A JP 13291484 A JP13291484 A JP 13291484A JP S6113101 A JPS6113101 A JP S6113101A
Authority
JP
Japan
Prior art keywords
nut
feed screw
feeding mechanism
movement
carriage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59132914A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0576561B2 (show.php
Inventor
Yukio Okita
沖田　雪男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Optical Co Ltd
Original Assignee
Tokyo Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Optical Co Ltd filed Critical Tokyo Optical Co Ltd
Priority to JP59132914A priority Critical patent/JPS6113101A/ja
Publication of JPS6113101A publication Critical patent/JPS6113101A/ja
Publication of JPH0576561B2 publication Critical patent/JPH0576561B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission Devices (AREA)
JP59132914A 1984-06-29 1984-06-29 送り機構 Granted JPS6113101A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59132914A JPS6113101A (ja) 1984-06-29 1984-06-29 送り機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59132914A JPS6113101A (ja) 1984-06-29 1984-06-29 送り機構

Publications (2)

Publication Number Publication Date
JPS6113101A true JPS6113101A (ja) 1986-01-21
JPH0576561B2 JPH0576561B2 (show.php) 1993-10-22

Family

ID=15092469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59132914A Granted JPS6113101A (ja) 1984-06-29 1984-06-29 送り機構

Country Status (1)

Country Link
JP (1) JPS6113101A (show.php)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62241633A (ja) * 1986-04-11 1987-10-22 Hiihaisuto Seiko Kk 直線送り機構
JPS62261090A (ja) * 1986-05-07 1987-11-13 株式会社ニコン 移動部材の送り装置
JPS6383446A (ja) * 1986-09-25 1988-04-14 Agency Of Ind Science & Technol ねじ送り装置におけるナツトホルダ
JPS63290988A (ja) * 1987-05-22 1988-11-28 日立電子エンジニアリング株式会社 ステージ移動機構
JPH0262455A (ja) * 1988-08-26 1990-03-02 Seibu Electric & Mach Co Ltd 送りねじ支持機構
JPH0363513A (ja) * 1989-08-01 1991-03-19 Mitsutoyo Corp 測定機
JPH0386238U (show.php) * 1989-12-25 1991-08-30
JPH03270844A (ja) * 1990-03-20 1991-12-03 Nippon Seiko Kk スライドテーブル機構
JP2007146922A (ja) * 2005-11-25 2007-06-14 Hiihaisuto Seiko Kk 調整装置及び調整システム
JP2008248938A (ja) * 2007-03-29 2008-10-16 Iai:Kk アクチュエータ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5474774A (en) * 1977-11-26 1979-06-15 Tokyo Seimitsu Co Ltd Machine for measuring coordinates
JPS54125257U (show.php) * 1978-02-22 1979-09-01
JPS56121105U (show.php) * 1981-01-27 1981-09-16

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5474774A (en) * 1977-11-26 1979-06-15 Tokyo Seimitsu Co Ltd Machine for measuring coordinates
JPS54125257U (show.php) * 1978-02-22 1979-09-01
JPS56121105U (show.php) * 1981-01-27 1981-09-16

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62241633A (ja) * 1986-04-11 1987-10-22 Hiihaisuto Seiko Kk 直線送り機構
JPS62261090A (ja) * 1986-05-07 1987-11-13 株式会社ニコン 移動部材の送り装置
JPS6383446A (ja) * 1986-09-25 1988-04-14 Agency Of Ind Science & Technol ねじ送り装置におけるナツトホルダ
JPS63290988A (ja) * 1987-05-22 1988-11-28 日立電子エンジニアリング株式会社 ステージ移動機構
JPH0262455A (ja) * 1988-08-26 1990-03-02 Seibu Electric & Mach Co Ltd 送りねじ支持機構
JPH0363513A (ja) * 1989-08-01 1991-03-19 Mitsutoyo Corp 測定機
JPH0386238U (show.php) * 1989-12-25 1991-08-30
JPH03270844A (ja) * 1990-03-20 1991-12-03 Nippon Seiko Kk スライドテーブル機構
JP2007146922A (ja) * 2005-11-25 2007-06-14 Hiihaisuto Seiko Kk 調整装置及び調整システム
JP2008248938A (ja) * 2007-03-29 2008-10-16 Iai:Kk アクチュエータ

Also Published As

Publication number Publication date
JPH0576561B2 (show.php) 1993-10-22

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