JPS61130784U - - Google Patents
Info
- Publication number
- JPS61130784U JPS61130784U JP1269785U JP1269785U JPS61130784U JP S61130784 U JPS61130784 U JP S61130784U JP 1269785 U JP1269785 U JP 1269785U JP 1269785 U JP1269785 U JP 1269785U JP S61130784 U JPS61130784 U JP S61130784U
- Authority
- JP
- Japan
- Prior art keywords
- piezo
- vibrator
- hole
- piezo elements
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1269785U JPH0128313Y2 (zh) | 1985-01-31 | 1985-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1269785U JPH0128313Y2 (zh) | 1985-01-31 | 1985-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61130784U true JPS61130784U (zh) | 1986-08-15 |
| JPH0128313Y2 JPH0128313Y2 (zh) | 1989-08-29 |
Family
ID=30496006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1269785U Expired JPH0128313Y2 (zh) | 1985-01-31 | 1985-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0128313Y2 (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006220056A (ja) * | 2005-02-10 | 2006-08-24 | Nec Tokin Corp | 流体搬送装置 |
| KR100868898B1 (ko) * | 2007-07-30 | 2008-11-14 | 한국기계연구원 | 적층형 ｐｚｔ를 이용한 압전펌프 |
| WO2017135206A1 (ja) * | 2016-02-01 | 2017-08-10 | 株式会社村田製作所 | 気体制御装置 |
-
1985
- 1985-01-31 JP JP1269785U patent/JPH0128313Y2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006220056A (ja) * | 2005-02-10 | 2006-08-24 | Nec Tokin Corp | 流体搬送装置 |
| KR100868898B1 (ko) * | 2007-07-30 | 2008-11-14 | 한국기계연구원 | 적층형 ｐｚｔ를 이용한 압전펌프 |
| WO2017135206A1 (ja) * | 2016-02-01 | 2017-08-10 | 株式会社村田製作所 | 気体制御装置 |
| JPWO2017135206A1 (ja) * | 2016-02-01 | 2018-02-08 | 株式会社村田製作所 | 気体制御装置 |
| US11378071B2 (en) | 2016-02-01 | 2022-07-05 | Murata Manufacturing Co., Ltd. | Gas control device |
| US12000389B2 (en) | 2016-02-01 | 2024-06-04 | Murata Manufacturing Co., Ltd. | Gas control device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0128313Y2 (zh) | 1989-08-29 |