JPS61130476A - Manufacture of high tensile copper alloy material - Google Patents

Abstract

PURPOSE:To improve electrical and thermal conductivities, strength, by stretch working Cu alloy contg. prescribed ratios of Co, CuO, Cu2O, A4l2O3, ZrO2, rare earth elements, while conducting electricity in a prescribed magnetic field. CONSTITUTION:Cu alloy composed of 5-20wt% Co, 0.1-1.5wt% >= one kind among CuO, CuO2, Al2O3 or ZrO2, 0.1-1% rare earth element, and the balance Cu is prepd. The Cu alloy is rolled or drawing worked while conducting electricity in 3,000-6,000Oe magnetic field in direction orthogonal thereto.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to wire electrodes used in wire-cut electric discharge machining equipment, steel alloy materials used in ICs, LSTs, etc.
In particular, the present invention relates to a method of manufacturing a copper alloy material having high tensile strength.

[Conventional technology]

Wire-cut electrical discharge machining involves creating an electrical discharge between a wire electrode and the workpiece, and cutting the workpiece through the resulting discharge erosion phenomenon. Especially suitable for processing.

The material for the wire electrode used in the above-mentioned wire-cut electrical discharge machining is preferably one that is easy to draw, has good conductivity, and can provide a high processing speed when used as an electrode. has a small consumption ratio,
It has excellent heat resistance and does not deteriorate in tensile strength especially at high temperatures and is difficult to break during use.It also does not cause work hardening and is suitable for two-dimensional processing.
In addition to three-dimensional machining, machining at locations where the wire electrode is wound or bent is easy, and in addition to this, the amount of deflection of the wire electrode during electrical discharge machining (so-called tying amount μ)
properties such as small pore size and good hydrophilicity are required.

For this reason, the electrode material is generally pure copper or a copper alloy such as brass, or pure copper with cuprous oxide (Cu20).
For special purposes, tungsten, molybdenum, or their alloys are used.

However, all of these electrode materials have advantages and disadvantages, and do not have the above-mentioned various properties required for wire electrodes, and no material has been provided that is particularly excellent in both conductivity and tensile strength.

On the other hand, Kovar was first used as an alloy for ICs, LSIs, etc., and then 42 alloy, 52 alloy, etc. were used. With the development of ultra-large-scale integrated circuits such as VLSI, alloys with particularly excellent electrical conductivity, thermal conductivity, and strength were required, and currently iron alloys and copper alloys are being used. are used in approximately the same ratio.

This type of alloy is also required to be excellent in both electrical conductivity and strength, as in the case of wire electrodes. However, the relationship between electrical conductivity and strength generally has the characteristic that as the electrical conductivity increases, the strength decreases, and in the future, how can we maintain the strength that decreases as the electrical conductivity increases? This has become an important research topic.

Various methods have been studied to maintain high electrical conductivity and strength, among which a combination treatment with spinodal decomposition and other mechanisms is considered to be the best method.

For example, Cu--Ni alloys were conventionally considered to be completely solid solution alloys, but spinodal decomposition occurs by adding special elements or by performing treatments.

Although copper alloys generally have the property that the Young's modulus decreases when other elements are added, in Cu-Ni spinodal alloys, the addition of the above elements improves the Young's modulus and suppresses the decrease in electrical conductivity. be able to.

Therefore, when a Cu-Ni alloy is subjected to a combined treatment such as spinodal decomposition treatment and strengthening means, the strength can be increased to, for example, 60 kg/
1 m2 and an electrical conductivity of 80%, which is an extremely excellent value for an alloy for LSI at present, and also a value suitable for an alloy for VLSI.

Furthermore, a requirement for this type of alloy is that it has a low coefficient of thermal expansion. In general, iron-based alloys have a small coefficient of thermal expansion, and copper-based alloys have a large coefficient of expansion. However, copper-based alloys are used as alloys for lead frames because their thermal conductivity is approximately 10 times that of iron-based alloys. Therefore, the biggest challenge in the future is how to lower the coefficient of thermal expansion of copper-based alloys.

[Problems to be solved by the present invention]

The present invention has been made based on the above-mentioned viewpoint, and its purpose is to have high tensile strength, as well as excellent electrical conductivity, thermal conductivity, strength, etc., and is suitable for LSI as well as LS (2) Furthermore, the present invention aims to provide a high tensile strength copper alloy material that can be used as a wire electrode material, etc.

[Means for solving problems]

Therefore, the above purpose is to achieve a concentration of 5 to 20% Co by weight percentage.
and 0.1-1.5% Cub, Cu20. A12
A copper alloy consisting of a compound selected from ZrO2 or ZrO2, 0.1 to 1% of a rare earth element, and the balance being Cu and unavoidable impurities is placed in a magnetic field in a direction perpendicular to the above magnetic field. This is accomplished by applying current to the material and rolling or drawing it.

[For production]

If a copper alloy material is produced by the method described above, a kind of electromagnetic stirring will occur inside the alloy during the process of passing current within a magnetic field in a direction perpendicular to the magnetic field, or electromagnetic stress will also act inside the alloy. However, since coarsening of the crystals is prevented, it is possible to obtain much higher tensile strength than conventional copper alloy materials, and it also maintains high electrical conductivity and thermal conductivity, making it suitable for not only LSI but also VLSI. It can also be used as copper alloy material,
Furthermore, it is suitable as a wire electrode material, and a copper alloy material can be produced that can be used in a wide range of fields.

〔Example〕

Hereinafter, the method of the present invention will be specifically explained with reference to the drawings and some examples.

FIG. 1 is an explanatory diagram showing the basic configuration of an apparatus for carrying out the method of the present invention, and FIG. 2 is an explanatory diagram showing the same type of apparatus with a different configuration.

In FIG. 1, 1 is a copper alloy material, 2 is an electromagnet consisting of a yoke 2a and a coil 2b, and 3 and 4 are material 1.
energizing rollers that energize; 5 and 6 are pinch rollers;
7 is a power source for energizing, and 8 and 9 are rolling rollers.

As material 1, 5 to 20% Co
．． 1-1.5% Cub, Cu20. Any one compound selected from ^1203 or ZrO2, and 0
．． A copper alloy consisting of 1-1% rare earth elements and the remainder Cu and unavoidable impurities is passed through.

The magnetic pole portion at the tip of the yoke 2a of the electromagnet 2 is arranged with a small gap from the rolling rollers 8 and 9 as shown in the figure.
When the coil 2b wound around the yoke is excited by passing current through it, the lines of magnetic force pass through the material 1 in the vertical direction in the figure through the rolling rollers 8 and 9 made of a magnetic material.

In this case, the current flowing through the coil 2b is adjusted so that a magnetic field of about 3,000 to 6,000 degrees is generated between the rolling rollers 8 and 9.

The material 1 is fed into the magnetic field of 3,000 to 6,000 oersteds through three parts that are energized by a feed roller (not shown), rolled by rolling rollers 8 and 9, and then taken out by another energized roller 4. It is taken out after passing through.

During the period when the material 1 passes through the magnetic field, a DC, pulsed or alternating current of 5 to several tens of amperes is applied to the material 1 from the energizing power source 7 via the energizing rollers 3 and 4. Therefore, this current is caused to flow approximately perpendicularly to the magnetic field. In such a case, electromagnetic stirring occurs within the material 1 due to the alternation between the magnetic field generated by the current flowing within the material 1 and the external magnetic field generated by the electromagnet 2, or a strain force due to electromagnetic stress acts, causing coarsening of the material alloy. Crystallization is prevented.

Thus, during the period of electromagnetic stirring as described above, the material 1 is rolled and drawn out by the rolling rollers 8 and 9.
Thereafter, appropriate aging treatment will be performed.

FIG. 2 shows the basic configuration of an apparatus for producing wire rods such as wire electrodes by drawing a round bar-shaped material 1 according to the method of the present invention, and the same reference numerals as in FIG. −
Or it indicates a component that has an equivalent effect. 1
0 is a drawing die, which also serves as an energizer for energizing the material 1.

In this case, as in the case of FIG. 1, the material 1 fed into the magnetic field of the electromagnet 2 is energized from the power supply 7 through the energizing roller 3 and the drawing die 10 in a direction perpendicular to the magnetic field. At the same time as electromagnetic stirring is carried out, drawing is carried out using a drawing die IO.

K night carp ±1) 15% Co and 0.5% Cu20 by weight percentage,
A copper alloy consisting of 0.2% rare earth element (Y) and the remainder Cu and unavoidable impurities is passed through a magnetic field of 4000 oersteds, and at the same time a current of 5011Z AC 10A is applied in a direction perpendicular to the magnetic field. A copper alloy material with a thickness of 0.1 ms was obtained by rolling.

The electrical conductivity of the obtained alloy material is 6% (■^CS unit) and the tensile strength is 83 kg/m2, which is much higher than the conventional alloy for lead frames such as ICs with electrical conductivity of 70-78%. A product with excellent properties was obtained.

Example (2) A copper alloy having the same composition as above is passed through a magnetic field of 5,000 oersteds, and at the same time, a copper alloy of 5,000 oersted is passed in a direction perpendicular to the magnetic field.
A wire rod with a diameter of 0.2++n was obtained by drawing the wire while applying an electric current of 011z at 10A AC.

When wire car/ ) electric discharge machining was performed using the above wire as a wire electrode, the result was Ip-560A, τ0N=0.
It was found that a processing speed of 310 m+m2/min was obtained under the condition of 8 μs, and there was no wire breakage, and a good wire electrode could be obtained.

In addition, in the composition of the copper alloy that is the raw material, C is used instead of Cu20.
Substantially the same effect can be obtained by using uO, ^1203, or ZrO2, and Sm, Pr, or Mitsushi metal can also be used as the rare earth element in addition to the above-mentioned Y.

〔Effect of the invention〕

Since the present invention is constructed as described above, when using the method of the present invention, it is possible to maintain high electrical conductivity, thermal conductivity, strength, etc., and it can be used as an alloy for lead frames of not only LSI but also VLSI. The present invention provides a high tensile strength steel alloy material that can be used as a wire electrode and also exhibits extremely excellent effects as a wire electrode.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram showing the basic configuration of an apparatus for carrying out the method of the present invention, and FIG. 2 is an explanatory diagram showing the same type of apparatus with a different configuration.

Claims (1)

[Claims] 1) 5 to 20% Co by weight percentage (the same applies hereinafter) and 0
．． 1-1.5% CuO, Cu_2O, Al_2O_3
Or, a copper alloy consisting of any one compound selected from ZrO_2, 0.1 to 1% of a rare earth element, and the remainder Cu and unavoidable impurities is placed in a magnetic field in a direction perpendicular to the above magnetic field. A method for manufacturing a high tensile strength copper alloy material, which comprises rolling or drawing while energizing the material. 2) The method for manufacturing a high-strength steel alloy material according to claim 1, wherein the magnetic field is 3,000 to 6,000 Oe.