JPS61130390U - - Google Patents

Info

Publication number

JPS61130390U

JPS61130390U JP1052485U JP1052485U JPS61130390U JP S61130390 U JPS61130390 U JP S61130390U JP 1052485 U JP1052485 U JP 1052485U JP 1052485 U JP1052485 U JP 1052485U JP S61130390 U JPS61130390 U JP S61130390U

Authority

JP

Japan

Prior art keywords

tank

vibrator

isolates

outer side

solvent atmosphere

Prior art date

1985-01-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
• 239000002904 solvent Substances 0.000 claims description 3
• 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
• 238000007599 discharging Methods 0.000 claims 1
• VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
• 238000010586 diagram Methods 0.000 description 3
• 239000000203 mixture Substances 0.000 description 3
• MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
• QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
• 238000004140 cleaning Methods 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1