JPS61130389U - - Google Patents
Info
- Publication number
- JPS61130389U JPS61130389U JP1162885U JP1162885U JPS61130389U JP S61130389 U JPS61130389 U JP S61130389U JP 1162885 U JP1162885 U JP 1162885U JP 1162885 U JP1162885 U JP 1162885U JP S61130389 U JPS61130389 U JP S61130389U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaned
- perforated plate
- liquid
- immersed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 4
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1162885U JPS61130389U (no) | 1985-01-30 | 1985-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1162885U JPS61130389U (no) | 1985-01-30 | 1985-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61130389U true JPS61130389U (no) | 1986-08-15 |
Family
ID=30493923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1162885U Pending JPS61130389U (no) | 1985-01-30 | 1985-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61130389U (no) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63110731A (ja) * | 1986-10-29 | 1988-05-16 | Nec Kyushu Ltd | 半導体基板処理装置 |
| WO2010131478A1 (ja) * | 2009-05-15 | 2010-11-18 | 昭和電工株式会社 | 流水式洗浄方法及び流水式洗浄装置 |
| JP2011529395A (ja) * | 2008-07-31 | 2011-12-08 | インベンプロ（エム）エスデーエヌ・ビーエイチデー | ワークピースの洗浄装置 |
-
1985
- 1985-01-30 JP JP1162885U patent/JPS61130389U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63110731A (ja) * | 1986-10-29 | 1988-05-16 | Nec Kyushu Ltd | 半導体基板処理装置 |
| JP2011529395A (ja) * | 2008-07-31 | 2011-12-08 | インベンプロ（エム）エスデーエヌ・ビーエイチデー | ワークピースの洗浄装置 |
| WO2010131478A1 (ja) * | 2009-05-15 | 2010-11-18 | 昭和電工株式会社 | 流水式洗浄方法及び流水式洗浄装置 |
| JP2010267340A (ja) * | 2009-05-15 | 2010-11-25 | Showa Denko Kk | 流水式洗浄方法及び流水式洗浄装置 |