JPS61129340U - - Google Patents
Info
- Publication number
- JPS61129340U JPS61129340U JP1376185U JP1376185U JPS61129340U JP S61129340 U JPS61129340 U JP S61129340U JP 1376185 U JP1376185 U JP 1376185U JP 1376185 U JP1376185 U JP 1376185U JP S61129340 U JPS61129340 U JP S61129340U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- synchronizing signal
- light
- receiver
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002131 composite material Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 6
- 230000003287 optical effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 6
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
Landscapes
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1376185U JPS61129340U (de) | 1985-01-31 | 1985-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1376185U JPS61129340U (de) | 1985-01-31 | 1985-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61129340U true JPS61129340U (de) | 1986-08-13 |
Family
ID=30498065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1376185U Pending JPS61129340U (de) | 1985-01-31 | 1985-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61129340U (de) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01144647A (ja) * | 1987-11-30 | 1989-06-06 | Fuji Electric Co Ltd | 半導体ウエハ計数装置 |
| JPH02198152A (ja) * | 1989-01-27 | 1990-08-06 | Hitachi Electron Eng Co Ltd | カセット内ウェハのハンドリング方法および装置 |
| JPH02198926A (ja) * | 1989-01-27 | 1990-08-07 | Hitachi Electron Eng Co Ltd | カセット内のウェハ取出し制御方式 |
| JP2846957B2 (ja) * | 1993-03-29 | 1999-01-13 | イェノプティック ゲーエムベーハー | 局所クリーンルームの操作面においてディスク状の物体を操作するための装置 |
-
1985
- 1985-01-31 JP JP1376185U patent/JPS61129340U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01144647A (ja) * | 1987-11-30 | 1989-06-06 | Fuji Electric Co Ltd | 半導体ウエハ計数装置 |
| JPH02198152A (ja) * | 1989-01-27 | 1990-08-06 | Hitachi Electron Eng Co Ltd | カセット内ウェハのハンドリング方法および装置 |
| JPH02198926A (ja) * | 1989-01-27 | 1990-08-07 | Hitachi Electron Eng Co Ltd | カセット内のウェハ取出し制御方式 |
| JP2846957B2 (ja) * | 1993-03-29 | 1999-01-13 | イェノプティック ゲーエムベーハー | 局所クリーンルームの操作面においてディスク状の物体を操作するための装置 |
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