JPS61127641U - - Google Patents
Info
- Publication number
- JPS61127641U JPS61127641U JP1075385U JP1075385U JPS61127641U JP S61127641 U JPS61127641 U JP S61127641U JP 1075385 U JP1075385 U JP 1075385U JP 1075385 U JP1075385 U JP 1075385U JP S61127641 U JPS61127641 U JP S61127641U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- wire
- wafer
- carrier according
- metal wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 239000004809 Teflon Substances 0.000 claims 1
- 229920006362 Teflon® Polymers 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1075385U JPS61127641U (enExample) | 1985-01-29 | 1985-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1075385U JPS61127641U (enExample) | 1985-01-29 | 1985-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61127641U true JPS61127641U (enExample) | 1986-08-11 |
Family
ID=30492229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1075385U Pending JPS61127641U (enExample) | 1985-01-29 | 1985-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61127641U (enExample) |
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1985
- 1985-01-29 JP JP1075385U patent/JPS61127641U/ja active Pending