JPS61127630U - - Google Patents
Info
- Publication number
- JPS61127630U JPS61127630U JP1001585U JP1001585U JPS61127630U JP S61127630 U JPS61127630 U JP S61127630U JP 1001585 U JP1001585 U JP 1001585U JP 1001585 U JP1001585 U JP 1001585U JP S61127630 U JPS61127630 U JP S61127630U
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- furnace core
- core tube
- discharge pipe
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 5
- 239000000126 substance Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1001585U JPH0514506Y2 (fi) | 1985-01-29 | 1985-01-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1001585U JPH0514506Y2 (fi) | 1985-01-29 | 1985-01-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61127630U true JPS61127630U (fi) | 1986-08-11 |
JPH0514506Y2 JPH0514506Y2 (fi) | 1993-04-19 |
Family
ID=30490807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1001585U Expired - Lifetime JPH0514506Y2 (fi) | 1985-01-29 | 1985-01-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0514506Y2 (fi) |
-
1985
- 1985-01-29 JP JP1001585U patent/JPH0514506Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0514506Y2 (fi) | 1993-04-19 |
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