JPS61125272U - - Google Patents

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Publication number
JPS61125272U
JPS61125272U JP827185U JP827185U JPS61125272U JP S61125272 U JPS61125272 U JP S61125272U JP 827185 U JP827185 U JP 827185U JP 827185 U JP827185 U JP 827185U JP S61125272 U JPS61125272 U JP S61125272U
Authority
JP
Japan
Prior art keywords
chamber
diaphragm
vacuum
atmosphere
communicates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP827185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6327569Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP827185U priority Critical patent/JPS6327569Y2/ja
Publication of JPS61125272U publication Critical patent/JPS61125272U/ja
Application granted granted Critical
Publication of JPS6327569Y2 publication Critical patent/JPS6327569Y2/ja
Expired legal-status Critical Current

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JP827185U 1985-01-24 1985-01-24 Expired JPS6327569Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP827185U JPS6327569Y2 (enrdf_load_stackoverflow) 1985-01-24 1985-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP827185U JPS6327569Y2 (enrdf_load_stackoverflow) 1985-01-24 1985-01-24

Publications (2)

Publication Number Publication Date
JPS61125272U true JPS61125272U (enrdf_load_stackoverflow) 1986-08-06
JPS6327569Y2 JPS6327569Y2 (enrdf_load_stackoverflow) 1988-07-26

Family

ID=30487395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP827185U Expired JPS6327569Y2 (enrdf_load_stackoverflow) 1985-01-24 1985-01-24

Country Status (1)

Country Link
JP (1) JPS6327569Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004508022A (ja) * 2000-09-06 2004-03-18 デラヴァール　ホルディング　アクチボラゲット ほぼ一定の真空を真空系内に維持する真空調圧器
KR100985763B1 (ko) 2009-11-11 2010-10-06 한국기계연구원 파일럿 타입 안전밸브 및 그 개폐방법
JP2012055214A (ja) * 2010-09-08 2012-03-22 Orion Machinery Co Ltd 真空調整器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004508022A (ja) * 2000-09-06 2004-03-18 デラヴァール　ホルディング　アクチボラゲット ほぼ一定の真空を真空系内に維持する真空調圧器
KR100985763B1 (ko) 2009-11-11 2010-10-06 한국기계연구원 파일럿 타입 안전밸브 및 그 개폐방법
JP2012055214A (ja) * 2010-09-08 2012-03-22 Orion Machinery Co Ltd 真空調整器

Also Published As

Publication number Publication date
JPS6327569Y2 (enrdf_load_stackoverflow) 1988-07-26

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