JPS61125172U - - Google Patents

Info

Publication number

JPS61125172U

JPS61125172U JP971985U JP971985U JPS61125172U JP S61125172 U JPS61125172 U JP S61125172U JP 971985 U JP971985 U JP 971985U JP 971985 U JP971985 U JP 971985U JP S61125172 U JPS61125172 U JP S61125172U

Authority

JP

Japan

Prior art keywords

dry etching

semiconductor wafers

etching chamber

chamber

transfer

Prior art date

1985-01-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 8
• 238000001312 dry etching Methods 0.000 claims description 6
• 238000005406 washing Methods 0.000 claims description 4
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
• 238000004519 manufacturing process Methods 0.000 claims description 2
• 235000012431 wafers Nutrition 0.000 claims 4
• 238000000034 method Methods 0.000 description 1