JPS61125171U - - Google Patents
Info
- Publication number
- JPS61125171U JPS61125171U JP15467584U JP15467584U JPS61125171U JP S61125171 U JPS61125171 U JP S61125171U JP 15467584 U JP15467584 U JP 15467584U JP 15467584 U JP15467584 U JP 15467584U JP S61125171 U JPS61125171 U JP S61125171U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- shield
- vacuum
- window
- window member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15467584U JPH0226937Y2 (https=) | 1984-10-13 | 1984-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15467584U JPH0226937Y2 (https=) | 1984-10-13 | 1984-10-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61125171U true JPS61125171U (https=) | 1986-08-06 |
| JPH0226937Y2 JPH0226937Y2 (https=) | 1990-07-20 |
Family
ID=30712667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15467584U Expired JPH0226937Y2 (https=) | 1984-10-13 | 1984-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226937Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101490423B1 (ko) * | 2008-02-15 | 2015-02-09 | 엘아이지에이디피 주식회사 | 플라즈마 처리장치 및 그에 구비되는 뷰 포트 |
-
1984
- 1984-10-13 JP JP15467584U patent/JPH0226937Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101490423B1 (ko) * | 2008-02-15 | 2015-02-09 | 엘아이지에이디피 주식회사 | 플라즈마 처리장치 및 그에 구비되는 뷰 포트 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0226937Y2 (https=) | 1990-07-20 |