JPS61123656U - - Google Patents

Info

Publication number
JPS61123656U
JPS61123656U JP495685U JP495685U JPS61123656U JP S61123656 U JPS61123656 U JP S61123656U JP 495685 U JP495685 U JP 495685U JP 495685 U JP495685 U JP 495685U JP S61123656 U JPS61123656 U JP S61123656U
Authority
JP
Japan
Prior art keywords
vacuum
electric motor
sealed container
processing apparatus
sealed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP495685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0750856Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985004956U priority Critical patent/JPH0750856Y2/ja
Publication of JPS61123656U publication Critical patent/JPS61123656U/ja
Application granted granted Critical
Publication of JPH0750856Y2 publication Critical patent/JPH0750856Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Motor Or Generator Frames (AREA)
JP1985004956U 1985-01-18 1985-01-18 真空処理装置 Expired - Lifetime JPH0750856Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985004956U JPH0750856Y2 (ja) 1985-01-18 1985-01-18 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985004956U JPH0750856Y2 (ja) 1985-01-18 1985-01-18 真空処理装置

Publications (2)

Publication Number Publication Date
JPS61123656U true JPS61123656U (th) 1986-08-04
JPH0750856Y2 JPH0750856Y2 (ja) 1995-11-15

Family

ID=30481025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985004956U Expired - Lifetime JPH0750856Y2 (ja) 1985-01-18 1985-01-18 真空処理装置

Country Status (1)

Country Link
JP (1) JPH0750856Y2 (th)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56145642A (en) * 1980-04-11 1981-11-12 Hitachi Ltd Reciprocal mechanism for intra-vacuum chamber body of revolution
JPS57127572U (th) * 1981-01-30 1982-08-09

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56145642A (en) * 1980-04-11 1981-11-12 Hitachi Ltd Reciprocal mechanism for intra-vacuum chamber body of revolution
JPS57127572U (th) * 1981-01-30 1982-08-09

Also Published As

Publication number Publication date
JPH0750856Y2 (ja) 1995-11-15

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