JPS61123533U - - Google Patents
Info
- Publication number
- JPS61123533U JPS61123533U JP682085U JP682085U JPS61123533U JP S61123533 U JPS61123533 U JP S61123533U JP 682085 U JP682085 U JP 682085U JP 682085 U JP682085 U JP 682085U JP S61123533 U JPS61123533 U JP S61123533U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- box
- semiconductor wafer
- outside air
- laser interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP682085U JPS61123533U (enExample) | 1985-01-23 | 1985-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP682085U JPS61123533U (enExample) | 1985-01-23 | 1985-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61123533U true JPS61123533U (enExample) | 1986-08-04 |
Family
ID=30484614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP682085U Pending JPS61123533U (enExample) | 1985-01-23 | 1985-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123533U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09166415A (ja) * | 1996-12-02 | 1997-06-24 | Nikon Corp | 露光装置 |
-
1985
- 1985-01-23 JP JP682085U patent/JPS61123533U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09166415A (ja) * | 1996-12-02 | 1997-06-24 | Nikon Corp | 露光装置 |