JPS61123351U - - Google Patents
Info
- Publication number
- JPS61123351U JPS61123351U JP283685U JP283685U JPS61123351U JP S61123351 U JPS61123351 U JP S61123351U JP 283685 U JP283685 U JP 283685U JP 283685 U JP283685 U JP 283685U JP S61123351 U JPS61123351 U JP S61123351U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- air
- exhaust chamber
- air purifying
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims 2
- 238000004887 air purification Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP283685U JPS61123351U (sl) | 1985-01-16 | 1985-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP283685U JPS61123351U (sl) | 1985-01-16 | 1985-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61123351U true JPS61123351U (sl) | 1986-08-04 |
Family
ID=30476886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP283685U Pending JPS61123351U (sl) | 1985-01-16 | 1985-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123351U (sl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6416540U (sl) * | 1987-07-20 | 1989-01-27 |
-
1985
- 1985-01-16 JP JP283685U patent/JPS61123351U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6416540U (sl) * | 1987-07-20 | 1989-01-27 |