JPS61122603A - Preparation of diffraction grating - Google Patents

Abstract

PURPOSE:To prepare inexpensively a diffraction grating and to obtain the diffraction grating having a desired characteristic by using a master plate on which the diffraction grating is formed to transfer the diffraction grating to a metallic or org. material. CONSTITUTION:A stripe mask in the <110> direction is formed on the (100) face of, for example, a silicon single crystal 1 and the crystal is etched to form the diffraction grating 2. An acrylic resin or the like is adhered onto a silicon master plate 3 and a replica 4 is prepared. Gold is deposited by evaporation or plated 5 onto the replica 4 to obtain a mold. The plate 5 of the gold is stretched or compressed in the direction perpendicular to the grooves thereof until the pitch P of the grooves and the angle beta of the crests attain desired values.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a diffraction grating used in optical communications, etc., and particularly relates to a method for manufacturing the same.

[Problems to be solved by conventional technology and invention]

Currently, in optical communication, a light wave multiplex transmission system is used as one type of multiplex communication. This method requires a demultiplexer on the receiving side to separate signals of multiple wavelengths. This demultiplexer uses a wavelength dispersion property of a diffraction grating, but conventional diffraction gratings are expensive, and a diffraction grating with a predetermined angle such as a 90' angle is silicon-etched. It was difficult to make.

[Means for solving problems]

The present invention provides a method for producing a diffraction grating that solves the above-mentioned problems. This is done by a grid fabrication method.

[For production]

The above-mentioned method for producing a diffraction grating enables the production of a diffraction grating at low cost by transferring the diffraction grating onto a metal or organic material from the original plate on which the diffraction grating is formed. By stretching or compressing the groove in the vertical direction, the pitch of the grooves and the angle of the peaks between the grooves can be set to desired values.

〔Example〕

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
explain.

FIG. 1 shows a process diagram for explaining a first embodiment of the present invention.

In this embodiment, first, as shown in FIG. 1a, a silicon single crystal 1
A striped mask in the <110> direction is formed on the (100) plane, and etching is performed to form the diffraction grating 2. In this case, due to the anisotropy of silicon, a (111) plane remains and the angle α formed by it is 70.53°. Next, as shown in Figure 1,
Adding acrylic resin etc. on silicon original plate 3 is replica 4
Create. Next, as shown in FIG.
)5 and take the mold.

Next, as shown in FIG. 1d, this gold plate 5 is stretched or compressed in a direction perpendicular to the grooves, so that the pitch P and angle β of the grooves are set to desired values. In this case, if the stretching ratio is set to 1.19 times, a diffraction grating with peak angle β of 90' can be obtained.

Next, a second embodiment is shown in FIG. In this embodiment, a layer of a transparent organic material such as an ultraviolet curing resin is formed on two sides of a triangular prism-shaped glass substrate 10, and a mold in which a diffraction grating is formed in metal, single crystal silicon, etc. The diffraction grating 11 is formed by pressing it parallel to the generatrix. Since the substrate of the diffraction grating formed in this manner is glass, light absorption loss can be reduced compared to when a resin substrate is used.

〔Effect of the invention〕

As explained above, according to Raikou and Akira, a diffraction grating can be produced at low cost by transferring a diffraction grating onto a metal or organic material from an original plate on which a diffraction grating has been formed, and it is also possible to produce a diffraction grating at a low cost by transferring a diffraction grating from an original plate onto a metal. By stretching or compressing a diffraction grating in a direction perpendicular to its grooves, the pitch of the grooves and the angle of the peaks between the grooves can be changed to obtain a diffraction grating with desired characteristics.

This is a very effective way to do it.

[Brief explanation of drawings]

FIG. 1 is a diagram for explaining a first embodiment of the method for manufacturing a diffraction grating of the present invention, and FIG. 2 is a diagram for explaining a second embodiment of the present invention. In the figure, 1 is a silicon single crystal, 2 is a diffraction grating, 3 is an original plate,
4 is a replica, 5 is a gold plate, 10 is a glass substrate, and 11 is a diffraction grating. Figure 2

Claims (1)

[Scope of Claims] 1. A method for producing a diffraction grating, which comprises transferring a diffraction grating onto a metal or organic material using an original plate on which a diffraction grating is formed. 2. The original plate forms a diffraction grating using anisotropic etching of silicon single crystal, and the diffraction grating transferred to the metal is stretched or compressed in the direction perpendicular to the grooves to adjust the pitch of the grooves and the peaks between the grooves. 2. The method of manufacturing a diffraction grating according to claim 1, wherein the angle of the diffraction grating is set to a desired value. 3. The original plate has a silicon surface (111), a diffraction grating transferred to the metal has a stretching ratio of 1.19 times, and the angle between the grooves is 90°. A method for producing a diffraction grating according to scope 2. 4. Claim 1, wherein the original plate is made of metal or silicon single crystal, and the organic material to be transferred is transparent and provided on a glass substrate.
A method for producing a diffraction grating as described in Section 1. 5. The diffraction grating according to claim 4, wherein a triangular prism-shaped substrate is used as the glass substrate, and the grooves of the diffraction grating are formed on two surfaces thereof with the direction parallel to the generatrix of the triangular prism. Production method.