JPS61121931U - - Google Patents

Info

Publication number
JPS61121931U
JPS61121931U JP548985U JP548985U JPS61121931U JP S61121931 U JPS61121931 U JP S61121931U JP 548985 U JP548985 U JP 548985U JP 548985 U JP548985 U JP 548985U JP S61121931 U JPS61121931 U JP S61121931U
Authority
JP
Japan
Prior art keywords
inner cylinder
air
low
space
temperature section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP548985U
Other languages
English (en)
Japanese (ja)
Other versions
JPS632100Y2 (US20070244113A1-20071018-C00169.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP548985U priority Critical patent/JPS632100Y2/ja
Publication of JPS61121931U publication Critical patent/JPS61121931U/ja
Application granted granted Critical
Publication of JPS632100Y2 publication Critical patent/JPS632100Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
  • Electrostatic Separation (AREA)
JP548985U 1985-01-18 1985-01-18 Expired JPS632100Y2 (US20070244113A1-20071018-C00169.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP548985U JPS632100Y2 (US20070244113A1-20071018-C00169.png) 1985-01-18 1985-01-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP548985U JPS632100Y2 (US20070244113A1-20071018-C00169.png) 1985-01-18 1985-01-18

Publications (2)

Publication Number Publication Date
JPS61121931U true JPS61121931U (US20070244113A1-20071018-C00169.png) 1986-08-01
JPS632100Y2 JPS632100Y2 (US20070244113A1-20071018-C00169.png) 1988-01-20

Family

ID=30482040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP548985U Expired JPS632100Y2 (US20070244113A1-20071018-C00169.png) 1985-01-18 1985-01-18

Country Status (1)

Country Link
JP (1) JPS632100Y2 (US20070244113A1-20071018-C00169.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63264118A (ja) * 1987-04-22 1988-11-01 Ulvac Corp 真空排気系用微粒子トラツプ
JPS63287524A (ja) * 1987-05-19 1988-11-24 Ulvac Corp 真空排気系用微粒子捕集装置
JP2009028632A (ja) * 2007-07-26 2009-02-12 Tokyo Electron Ltd 気体清浄化装置及び気体清浄化方法
JP2013039565A (ja) * 2012-09-03 2013-02-28 Tokyo Electron Ltd 気体清浄化装置
CN106178770A (zh) * 2016-10-11 2016-12-07 中国计量大学 基于热泳效应的空气小颗粒吸附装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63264118A (ja) * 1987-04-22 1988-11-01 Ulvac Corp 真空排気系用微粒子トラツプ
JPS63287524A (ja) * 1987-05-19 1988-11-24 Ulvac Corp 真空排気系用微粒子捕集装置
JP2009028632A (ja) * 2007-07-26 2009-02-12 Tokyo Electron Ltd 気体清浄化装置及び気体清浄化方法
JP2013039565A (ja) * 2012-09-03 2013-02-28 Tokyo Electron Ltd 気体清浄化装置
CN106178770A (zh) * 2016-10-11 2016-12-07 中国计量大学 基于热泳效应的空气小颗粒吸附装置
CN106178770B (zh) * 2016-10-11 2019-01-25 中国计量大学 基于热泳效应的空气小颗粒吸附装置

Also Published As

Publication number Publication date
JPS632100Y2 (US20070244113A1-20071018-C00169.png) 1988-01-20

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