JPS61121737U - - Google Patents
Info
- Publication number
- JPS61121737U JPS61121737U JP564385U JP564385U JPS61121737U JP S61121737 U JPS61121737 U JP S61121737U JP 564385 U JP564385 U JP 564385U JP 564385 U JP564385 U JP 564385U JP S61121737 U JPS61121737 U JP S61121737U
- Authority
- JP
- Japan
- Prior art keywords
- extension tube
- diffusion
- nozzle
- tube
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 6
- 239000000112 cooling gas Substances 0.000 claims description 2
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985005643U JPH0737309Y2 (ja) | 1985-01-18 | 1985-01-18 | 拡散炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985005643U JPH0737309Y2 (ja) | 1985-01-18 | 1985-01-18 | 拡散炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61121737U true JPS61121737U (xx) | 1986-07-31 |
| JPH0737309Y2 JPH0737309Y2 (ja) | 1995-08-23 |
Family
ID=30482335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985005643U Expired - Lifetime JPH0737309Y2 (ja) | 1985-01-18 | 1985-01-18 | 拡散炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737309Y2 (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0269932A (ja) * | 1988-09-05 | 1990-03-08 | Hitachi Ltd | 半導体ウェハの熱処理装置、及び熱処理方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57106119A (en) * | 1980-12-24 | 1982-07-01 | Hitachi Ltd | Heating furnace |
-
1985
- 1985-01-18 JP JP1985005643U patent/JPH0737309Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57106119A (en) * | 1980-12-24 | 1982-07-01 | Hitachi Ltd | Heating furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0269932A (ja) * | 1988-09-05 | 1990-03-08 | Hitachi Ltd | 半導体ウェハの熱処理装置、及び熱処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0737309Y2 (ja) | 1995-08-23 |