JPS61121734A - Stator for rotary electric machine - Google Patents

Stator for rotary electric machine

Info

Publication number
JPS61121734A
JPS61121734A JP24043484A JP24043484A JPS61121734A JP S61121734 A JPS61121734 A JP S61121734A JP 24043484 A JP24043484 A JP 24043484A JP 24043484 A JP24043484 A JP 24043484A JP S61121734 A JPS61121734 A JP S61121734A
Authority
JP
Japan
Prior art keywords
lead wire
wire
welded
section
varnish
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24043484A
Other languages
Japanese (ja)
Inventor
Keisuke Yamanaka
山中 桂介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP24043484A priority Critical patent/JPS61121734A/en
Publication of JPS61121734A publication Critical patent/JPS61121734A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K3/00Details of windings
    • H02K3/46Fastening of windings on the stator or rotor structure
    • H02K3/50Fastening of winding heads, equalising connectors, or connections thereto
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F5/00Coils
    • H01F5/04Arrangements of electric connections to coils, e.g. leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R4/00Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
    • H01R4/02Soldered or welded connections

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Insulation, Fastening Of Motor, Generator Windings (AREA)
  • Manufacture Of Motors, Generators (AREA)

Abstract

PURPOSE:To prevent varnish from infiltrating into a lead wire, by disconnecting a capillary tube between an insulation-braided section and a cable, conductor of the lead wire. CONSTITUTION:The end section of the cable core conductor 2 of a lead wire 1 is connected to a stator coil end 6 to be twisted together and welded. Some section of the insulation-braided section 3 of the lead wire 1 is longitudinally heated and burnt out, and the cross sections are welded with welded sections 4a, 4b where synthetic resin insulation substance organizing the insulation- braided section 3 is dissolved and solidified. Solder is fitted on the section of the cable conductor where the insulation-braided section 3 of the elad wire 1 is burnt out and exposed, and a soldered section 5 is formed with the solder. The capillary tube of the insulation-braided section 3 of the lead wire 1 is disconnected with the welded sections 4a, 4b on the cross sections, and the capillary tube of the cable conductor 2 is disconnected with the soldered section 5. In this manner, varnish can be prevented from infiltrating into due to capillarity action.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、回転電機用固定子に係り、さらに詳しくは鉄
心にコイルを巻装し、このコイルに、より線からなる芯
線と、合成樹脂絶縁材からなる絶縁gML部とで構成さ
れた口出線を接続した後、ワニス処理を行なってコイル
を固定する際、前記絶縁編組部と芯線の毛細管現象によ
るワニスの浸透を防ぐために好適な回転電機用固定子に
関する。
[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a stator for a rotating electric machine, and more specifically, a coil is wound around an iron core, and a core wire made of stranded wire and a synthetic resin insulated wire are attached to the coil. A rotating electric machine suitable for preventing penetration of varnish due to capillary action between the insulating braided part and the core wire when fixing the coil by performing varnish treatment after connecting the lead wire constituted by the insulating gML part made of material. Regarding the stator for use.

〔発明の背景〕[Background of the invention]

この種回転電機用固定子は、鉄心内にコイルを巻装し、
このコイルの端部に、口出線を接続し、ついでワニス処
理を施して鉄心やボビンにコイルを固定するようにして
いる。
This type of stator for rotating electric machines has a coil wound around the iron core.
A lead wire is connected to the end of this coil, and then varnished to fix the coil to the iron core or bobbin.

ところで、前記口出線はより線からなる芯線と、合成樹
脂絶縁材からなる絶縁Hi組部とで構成されている。こ
のため、口出線には芯線および絶縁編組部の毛細管現象
により、ワニス処理時にワニスが浸透する。前記口出線
にワニスが浸透して固化し、可撓性を失ってしまうと、
回転電機用固定子としての使用中に、コイルに励磁電流
を流した時に電磁振動を起こした際、前記口出線の部分
が電磁振動を吸収不能となり、断線してしまうことがあ
る。
By the way, the lead wire is composed of a core wire made of a stranded wire and an insulated Hi assembly part made of a synthetic resin insulating material. Therefore, the varnish penetrates into the lead wire during varnish treatment due to capillary action in the core wire and the insulating braided portion. If the varnish penetrates into the lead wire and solidifies, it loses its flexibility.
During use as a stator for a rotating electric machine, when electromagnetic vibration occurs when an excitation current is passed through the coil, the lead wire portion may become unable to absorb the electromagnetic vibration and may break.

前記口出線へのワニスの浸透を防止する先行技術として
は、特公昭57−51250号公報に示されているもの
(以下、第1の先行技術という)と、特開昭59−21
246号公報に示されているもの(以下、第2の先行技
術という)とがある。
Prior art techniques for preventing penetration of varnish into the lead wire include the one disclosed in Japanese Patent Publication No. 57-51250 (hereinafter referred to as the first prior art) and the one disclosed in Japanese Patent Publication No. 59-21
There is a technique disclosed in Japanese Patent No. 246 (hereinafter referred to as the second prior art).

前記第1の先行技術は、口出線にワニスの溶剤よりも沸
点の高い液体を付着させ、この液体が完全に蒸発する以
前にコイルをワニスで絶縁処理するようにしている。こ
の第1の先行技術では、口出線の絶縁編組部および芯線
の毛細管部へのワニスの浸透は防止できるが、最近ワニ
ス処理温度が高くなっており、封止用の沸点の高い液体
である油性のものを用いても、高温下でワニス処理を行
うと、粘度が低くなるため、ワニスの浸透防止作用が低
減してしまう問題がある。
In the first prior art, a liquid having a boiling point higher than the varnish solvent is attached to the lead wire, and the coil is insulated with the varnish before the liquid evaporates completely. In this first prior art, it is possible to prevent the varnish from penetrating into the insulating braided part of the lead wire and the capillary part of the core wire, but recently the varnish processing temperature has increased, and the liquid used for sealing has a high boiling point. Even if an oil-based varnish is used, if the varnish is treated at high temperatures, the viscosity will decrease, resulting in a problem in that the penetration prevention effect of the varnish will be reduced.

前記第2の先行技術は1口出線(リード線)の一部に、
ワニスの浸透を防止する歯止め部を設けている。この歯
止め部は、−例として第6図に示すよ、うに、芯線61
と、この芯線61を覆う第1編組層と、これに巻装され
たポリエステルフィルム層62と、このポリエステルフ
ィルム層62を覆う第2編組層63とからなる口出線6
0において、前記第2編組層63の一部分を除去し、ポ
リエステルフィルム層62を剥き出しにし、これを歯止
め部としている。また、歯止め部の別の例としては、第
7図に示すように1ロ出線60の一部分に金属管64を
被せ。
The second prior art has a part of one outlet wire (lead wire),
A pawl is provided to prevent varnish from penetrating. This pawl is formed by a core wire 61, as shown in FIG. 6, for example.
A lead wire 6 consisting of a first braided layer covering this core wire 61, a polyester film layer 62 wound around this, and a second braided layer 63 covering this polyester film layer 62.
0, a portion of the second braided layer 63 is removed to expose the polyester film layer 62, which serves as a pawl. Further, as another example of the pawl part, a metal tube 64 is placed over a part of the 1-ro output wire 60 as shown in FIG.

この金属管64をかしめている。さらに、前記第6図お
よび第7図に示す技術を組み合わせた歯止め部も例示さ
れている。
This metal tube 64 is caulked. Furthermore, a pawl portion that combines the techniques shown in FIGS. 6 and 7 is also illustrated.

なお、第6図および第7図中、65はコイル足、66は
コイル足と口出線の芯線とをより合わせて溶接した部分
を示す。
In FIGS. 6 and 7, reference numeral 65 indicates a coil leg, and 66 indicates a portion where the coil leg and the core wire of the lead wire are twisted together and welded.

しかし、前記第2の先行技術において、第6図に示すよ
うな歯止め部では、少なくともより線としての芯線61
の毛細管現象によるワニスの浸透を回避できない懸念が
ある。また、第2の先行技術の第7図に示すような歯止
め部では、金属管64のかしめ力によりワニス浸透防止
作用が異なってくるので、かしめ力のばらつきにより製
品のワニス浸透防止作用にばらつきが生じるおそれがあ
る。
However, in the second prior art, in the pawl portion as shown in FIG.
There is a concern that penetration of the varnish due to capillary action cannot be avoided. In addition, in the pawl shown in FIG. 7 of the second prior art, the varnish penetration prevention effect varies depending on the caulking force of the metal tube 64, so variations in the caulking force cause variations in the varnish penetration prevention effect of the product. There is a risk that this may occur.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、前記先行技術の問題を解決し、高温下
でワニス処理を行っても、口出線へのワニスの浸透を防
止でき、かつ芯線および絶縁編組部の毛細管現象による
ワニスの浸透をより一層効果的に防止でき、しかもワニ
ス浸透防止作用のばらつきの少ない回転電機用固定子を
提供することにある。
An object of the present invention is to solve the problems of the prior art described above, to prevent varnish from penetrating into the lead wire even when varnish treatment is performed at high temperatures, and to prevent varnish from penetrating through the core wire and the insulating braided part due to capillary action. It is an object of the present invention to provide a stator for a rotating electric machine which can more effectively prevent varnish penetration and has less variation in varnish penetration prevention effect.

〔発明の概要〕[Summary of the invention]

本発明は、口出線の絶縁編組部の長さ方向の一部分を加
熱して溶断し、その切り口面を溶着したこと、露出され
た芯線をはんだ揚げしたこと、前記切り口面の溶着部と
はんだ揚げ部とにより1口出線の絶#罐組部と芯線との
毛細管をたち切ったことに特徴を有するもので、この構
成により、前記目的を全て達成することができる。
The present invention involves heating and fusing a part of the insulating braided portion of the lead wire in the length direction, welding the cut surface, soldering the exposed core wire, and soldering the welded portion of the cut surface with the solder. This is characterized in that the capillary tube between the single-outlet wire can assembly and the core wire is immediately cut by the raised portion, and with this configuration, all of the above objects can be achieved.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の実施例を図面により説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第1図は1本発明の一実施例を示すもので、口出線1は
細線をより合わせたより線からなる芯線2と、ポリエス
テル等の合成樹脂絶縁材からなる絶縁編組部3とで構成
されている。
FIG. 1 shows an embodiment of the present invention, in which a lead wire 1 is composed of a core wire 2 made of a twisted wire of fine wires, and an insulating braided portion 3 made of a synthetic resin insulating material such as polyester. ing.

前記口出線1の芯線2の端部は、固定子のコイル(図示
せず)のコイル足6とより合わせ、溶接して接続するよ
うになっており、その溶接部を符号9で示す。
The end of the core wire 2 of the lead wire 1 is twisted and connected to the coil leg 6 of a stator coil (not shown) by welding, and the welded portion is indicated by reference numeral 9.

前記口出線1の絶縁編組部3の長さ方向の一部分が加熱
され、焼き取られていて、その切り口面は、絶縁編組部
3を構成している合成樹脂絶縁材が溶けて固まった溶着
部4a、4bで溶着されている。前記絶縁編組部3を焼
き取る部分は、好ましくは口出線1とコイル足6とをよ
り合わせて溶接する際、熱の影響を受けにくい部分に設
定される。
A portion of the insulating braided portion 3 of the lead wire 1 in the length direction is heated and burnt off, and the cut surface is covered with welded material made by melting and solidifying the synthetic resin insulating material constituting the insulating braided portion 3. The parts 4a and 4b are welded together. The portion where the insulating braided portion 3 is burned out is preferably set at a portion that is not easily affected by heat when the lead wire 1 and the coil leg 6 are twisted together and welded.

前記口出線1の絶ia編組部3が焼き取られて露出され
た芯線の部分には、はんだが付着され、このはんだは前
記絶縁編組部3の一部分を焼き取る時の予熱と新たに加
熱した熱とにより溶は込んで、はんだ揚げ部5が形成さ
れている。
Solder is attached to the exposed core wire portion of the lead wire 1 when the insulating braided portion 3 is burned off, and this solder is used for preheating when burning off a portion of the insulating braided portion 3 and for heating again. The solder fried portion 5 is formed by melting and penetrating by the heat generated.

そして、口出線1の前記絶縁編組部3の毛細管は前記切
すロ面の溶着部4a、4bによりたち切られ、前記芯1
JA2の毛細管は前記はんだ揚げ部5によりたち切られ
ている。
Then, the capillary tube of the insulating braided portion 3 of the lead wire 1 is immediately cut by the welded portions 4a and 4b on the cut side, and the
The capillary tube of JA2 is cut by the soldering part 5.

また、この実施例では、口出線1の端部に、ワニスが浸
透しないポリエステルチューブ8を被せ、このポリエス
テルチューブ8の端部を口出線1の端面に溶着させ、そ
の溶着部9により絶縁編組部3へのワニスの浸透を防止
するようになっている6前記実施例の回転電機用固定子
では、コイル足6とのより合わせかつ溶接してコイルに
接続する口出線1の絶縁編組部3の一部分を焼き取り、
この焼き取る時に切り口面の溶着部4a、4bを形成し
、この溶着部4a、4bにより絶縁編組部3の毛細管を
たち切り、露出された芯線にはんだを溶は込ませたはん
だ揚げ部5により芯!2の毛細管をたち切っているので
、コイルのワニス処理に際して、芯線2および絶縁編組
部3の毛細管現象による芯線1のワニスの浸透を確実に
防止することができる。
In this embodiment, the end of the lead wire 1 is covered with a polyester tube 8 that is impermeable to varnish, and the end of this polyester tube 8 is welded to the end face of the lead wire 1, and the welded portion 9 provides insulation. 6 In the stator for a rotating electrical machine of the above embodiment, which is designed to prevent penetration of varnish into the braided portion 3, the insulating braid of the lead wire 1 is connected to the coil by twisting and welding with the coil leg 6. Burn off part of part 3,
At the time of baking, welds 4a and 4b are formed on the cut surface, and the capillaries of the insulating braided part 3 are immediately cut off by the welds 4a and 4b, and a solder fried part 5 is formed by melting solder into the exposed core wire. core! Since the capillary tubes 2 are immediately cut, it is possible to reliably prevent the varnish from penetrating the core wire 1 due to capillary action in the core wire 2 and the insulating braided portion 3 when varnishing the coil.

次に、第2図〜第5図は口出線の加工工程と。Next, Figures 2 to 5 show the processing steps for the lead line.

加工された口出線とコイル足との接続工程を示す。The process of connecting the processed lead wire and the coil leg is shown.

まず1口出線1の絶縁編組部3における口出線1の芯線
2とコイル足6とをより合わせて溶接する際の熱の影響
を受けにくい部分を、第2図に示すように、はんだごて
またはニクロム線等の加熱器具10により約200〜3
00℃に加熱し、焼き取る。
First, as shown in FIG. 2, solder the part of the insulated braided part 3 of the first lead wire 1 that is less affected by the heat when the core wire 2 of the lead wire 1 and the coil leg 6 are twisted together and welded. Approximately 200 to 300
Heat to 00℃ and burn it off.

この時、絶縁編組部3の切り口面が溶けて固まった溶着
部4a、4bが形成され、その溶着部4a。
At this time, the cut surfaces of the insulating braided portion 3 are melted and solidified to form welded portions 4a and 4b, and the welded portion 4a.

4bにより、絶縁Jf部3の毛細管をたち切る。4b, the capillary tube in the insulating Jf section 3 is cut off.

前述のごとく、絶aaI組部3の一部分を焼き取ること
により、芯線2の一部分が露出する。
As described above, by burning off a portion of the aaI combination portion 3, a portion of the core wire 2 is exposed.

前記絶縁編組部3の一部分を焼き取った後、露出された
芯線2′が温まっている間に、はんだを付着させ、さら
に第3図に示すように、加熱器具10により加熱しては
んだを溶かし、芯線2′をはんだ揚げし、その揚げ部5
により、より線からなる芯線2′の毛細管をたち切る。
After burning off a portion of the insulating braided portion 3, solder is applied to the exposed core wire 2' while it is being heated, and as shown in FIG. 3, the solder is melted by heating with a heating device 10. , the core wire 2' is soldered and fried, and the fried part 5
The capillary tube of the core wire 2' made of stranded wire is cut off.

続いて、前述の加工を施した口出線1の端部にポリエス
テルチューブ8を被せ、第4図に示すように、ポリエス
テルチューブ8の端部と口出線1の絶縁編組部3の端面
とを加熱器具10により加熱し、溶着部9を介して口出
線1の絶縁編組部3の端面にポリエステルチューブ8を
溶着する。
Next, the polyester tube 8 is placed over the end of the lead wire 1 that has been processed as described above, and as shown in FIG. is heated by the heating device 10, and the polyester tube 8 is welded to the end face of the insulating braided portion 3 of the lead wire 1 via the welding portion 9.

ついで、口出!11の端部の芯線とコイル足6とをより
合わせ、さらにはんだ付けし、第5図に示すように、溶
接部7を介して接続する。
Then, say it! The core wires at the ends of the wires 11 and the coil legs 6 are twisted together, soldered, and connected via welds 7, as shown in FIG.

そして、ワニス槽にコイルを浸漬させ、ワニス処理を施
し、回転電機用固定子を得る6〔発明の効果〕 以上説明した本発明によれば、より線からなる芯線と1
合成樹脂絶縁材からなる絶縁編組部とで構成された口出
線の、絶縁編組部の一部分を焼き切り、その切り口面を
溶着するとともに、露出された芯線をはんだ揚げし、前
記切り口面の溶着部とはんだ揚げ部とにより、口出線の
絶縁編組部と芯線との毛細管をたち切っているので、口
出線の芯線および絶縁編組部の毛細管現象によるワニス
の浸透を確実に防止し得る効果がある。
Then, the coil is immersed in a varnish bath and subjected to varnish treatment to obtain a stator for a rotating electrical machine.6 [Effects of the Invention] According to the present invention described above, a core wire made of stranded wires and a
A part of the insulating braided part of the lead wire, which is composed of an insulating braided part made of a synthetic resin insulating material, is burned off, the cut surface is welded, and the exposed core wire is soldered, and the welded part of the cut surface is welded. Since the capillary between the insulating braided part of the lead wire and the core wire is immediately cut by the soldering part and the soldering part, it is possible to reliably prevent varnish from penetrating through the core wire and the insulating braided part of the lead wire due to capillary action. be.

また、本発明によれば、前述のごとく、絶縁編組部の切
り口面に形成した溶着部と、芯線の一部分に形成したは
んだ揚げ部とにより、口出線へのワニスの浸透を防止す
るようにしているので、高温下でのワニス処理に際して
も、ワニスの浸透を防止し得る効果があり、ワニス浸透
防止作用のばらつきを少なくなし得る効果もある。
Further, according to the present invention, as described above, the welded portion formed on the cut surface of the insulating braided portion and the solder fried portion formed on a portion of the core wire prevent varnish from penetrating into the lead wire. Therefore, even during varnish treatment at high temperatures, it has the effect of preventing varnish penetration, and it also has the effect of reducing variations in the varnish penetration prevention effect.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の要部を示す側面図、第2図
ないし第5図はそれぞれ本発明を実施するための加工工
程の一例と1口出線とコイル足との接続工程とを示す図
、第6図および第7図は先行技術を示す側面図および一
部破断側面図である。 1・・・口出線、2・・・口出線の芯線、3・・・同絶
縁編組部、4a、 4b・・・絶縁編組部の切り口面の
溶着部、5・・・芯線のはんだ揚げ部、6・・・口出線
の芯線とにより合わせて溶接するコイル足、7・・・同
溶接部、8・・・口出線の端部に被させたポリエステル
チューブ、9・・・絶縁編組部とポリエステルチューブ
との溶着部。 代理人  弁理士   秋 本  正 実第1図 第 2図 第3図 第5図 第6図 第7図
FIG. 1 is a side view showing the main parts of an embodiment of the present invention, and FIGS. 2 to 5 are examples of processing steps and steps for connecting one output wire and a coil leg, respectively, for carrying out the present invention. FIGS. 6 and 7 are a side view and a partially cutaway side view showing the prior art. 1... Lead wire, 2... Core wire of the lead wire, 3... Insulated braided part, 4a, 4b... Welded part of the cut surface of the insulated braided part, 5... Solder of the core wire Lifted part, 6... Coil leg to be twisted together with the core wire of the lead wire and welded, 7... Welded part, 8... Polyester tube covered over the end of the lead wire, 9... The welded part between the insulating braided part and the polyester tube. Agent Patent Attorney Tadashi Akimoto Figure 1 Figure 2 Figure 3 Figure 5 Figure 6 Figure 7

Claims (1)

【特許請求の範囲】[Claims] 鉄心内にコイルを巻装し、このコイルにより線からなる
芯線と、合成樹脂絶縁材からなる絶縁編組部とで構成さ
れた口出線を接続し、ワニス処理を施して前記コイルを
固定する回転電機用固定子において、前記口出線の絶縁
編組部の一部を焼き切り、その切り口面を溶着するとと
もに、露出された芯線をはんだ揚げし、前記切り口面の
溶着部とはんだ揚げ部とにより、口出線の絶縁編組部と
芯線との毛細管をたち切ったことを特徴とする回転電機
用固定子。
A rotation process in which a coil is wound around an iron core, a lead wire consisting of a core wire made of wire and an insulating braided part made of a synthetic resin insulating material is connected by this coil, and the coil is fixed by applying varnish treatment. In a stator for an electric machine, a part of the insulating braided part of the lead wire is burned off, the cut surface is welded, and the exposed core wire is soldered, and the welded part and the solder fried part of the cut surface are combined to A stator for a rotating electrical machine, characterized in that the capillary tube between the insulating braided part of the lead wire and the core wire is cut off.
JP24043484A 1984-11-16 1984-11-16 Stator for rotary electric machine Pending JPS61121734A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24043484A JPS61121734A (en) 1984-11-16 1984-11-16 Stator for rotary electric machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24043484A JPS61121734A (en) 1984-11-16 1984-11-16 Stator for rotary electric machine

Publications (1)

Publication Number Publication Date
JPS61121734A true JPS61121734A (en) 1986-06-09

Family

ID=17059433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24043484A Pending JPS61121734A (en) 1984-11-16 1984-11-16 Stator for rotary electric machine

Country Status (1)

Country Link
JP (1) JPS61121734A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6394635A (en) * 1986-10-09 1988-04-25 Furendotetsuku Kenkyusho:Kk Device for manufacturing semiconductor
US9111748B2 (en) 2012-09-26 2015-08-18 Hitachi Kokusai Electric Inc. Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer readable recording medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6394635A (en) * 1986-10-09 1988-04-25 Furendotetsuku Kenkyusho:Kk Device for manufacturing semiconductor
US9111748B2 (en) 2012-09-26 2015-08-18 Hitachi Kokusai Electric Inc. Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer readable recording medium

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