JPS61119704U - - Google Patents
Info
- Publication number
- JPS61119704U JPS61119704U JP232885U JP232885U JPS61119704U JP S61119704 U JPS61119704 U JP S61119704U JP 232885 U JP232885 U JP 232885U JP 232885 U JP232885 U JP 232885U JP S61119704 U JPS61119704 U JP S61119704U
- Authority
- JP
- Japan
- Prior art keywords
- fine movement
- movement
- micrometer
- micrometers
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
Description
第１図は実施例の平面図、第２図は従来の微動
載物台の平面図、第３図は移動方向変換機構の実
施例の斜視図、第４図は従来のものの操作説明図
である。
図において、６は被計測物、７は回転テーブル
、８及び１８は微動載物台、１０，１１及び１１
１はマイクロメータ、１２はスピンドル、１３は
斜歯ラツクである。
Fig. 1 is a plan view of an embodiment, Fig. 2 is a plan view of a conventional fine movement stage, Fig. 3 is a perspective view of an embodiment of the movement direction conversion mechanism, and Fig. 4 is an explanatory diagram of the operation of the conventional one. be. In the figure, 6 is an object to be measured, 7 is a rotary table, 8 and 18 are fine movement stages, 10, 11, and 11.
1 is a micrometer, 12 is a spindle, and 13 is a beveled tooth rack.
Claims (1)
方向にそれぞれ微動を可能とした微動載物台にお
いて、前記２個のマイクロメータのうち一方のマ
イクロメータを他方のマイクロメータに対向する
位置に設け、一方のマイクロメータの動きを直交
する方向の動きに変換する手段を備えたことを特
徴とする微動載物台。 In a fine movement stage capable of fine movement in the X-axis and Y-axis directions by two micrometers, one of the two micrometers is provided at a position opposite to the other micrometer. , a fine movement stage characterized by comprising means for converting the movement of one micrometer into movement in an orthogonal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP232885U JPS61119704U (en) | 1985-01-14 | 1985-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP232885U JPS61119704U (en) | 1985-01-14 | 1985-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61119704U true JPS61119704U (en) | 1986-07-28 |
Family
ID=30475900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP232885U Pending JPS61119704U (en) | 1985-01-14 | 1985-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61119704U (en) |
-
1985
- 1985-01-14 JP JP232885U patent/JPS61119704U/ja active Pending
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