JPS61119367U - - Google Patents
Info
- Publication number
- JPS61119367U JPS61119367U JP1985001530U JP153085U JPS61119367U JP S61119367 U JPS61119367 U JP S61119367U JP 1985001530 U JP1985001530 U JP 1985001530U JP 153085 U JP153085 U JP 153085U JP S61119367 U JPS61119367 U JP S61119367U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- insulating layer
- bonding pads
- gaas
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 5
- 238000006664 bond formation reaction Methods 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
Description
第1図は本考案の第1実施例によるGaAsシ
ヨツトキーダイオードを示す平面図、第2図及び
第3図は第1図に示すGaAsシヨツトキーダイ
オードの製造に用いるフオトマスクを示す平面図
、第4図は本考案の第2実施例によるGaAsシ
ヨツトキーダイオードを示す平面図、第5図及び
第6図は第4図に示すGaAsシヨツトキーダイ
オードの製造に用いるフオトマスクを示す平面図
、第7図は本考案の第3実施例によるGaAsシ
ヨツトキーダイオードを示す平面図、第8図及び
第9図は第7図に示すGaAsシヨツトキーダイ
オードの製造を用いるフオトマスクを示す平面図
、第10図は本考案の変形例による表面二電極型
シヨツトキーダイオードを示す平面図、第11図
〜第14図は第10図に示す表面二電極型シヨツ
トキーダイオードの製造に用いるフオトマスクを
示す平面図、第15図は従来のpn接合ダイオー
ドを示す断面図、第16図は従来のシヨツトキー
ダイオードを示す断面図、第17図は従来の表面
二電極型シヨツトキーダイオードを示す断面図で
ある。
なお図面に用いた符号において、4,5……オ
ーミツク電極、6……pn接合、7……シヨツト
キー電極、8……シヨツトキー接合、9……Ga
Asチツプ、10,15……ボンデイング・パツ
ド、11〜14……フオトマスクである。
FIG. 1 is a plan view showing a GaAs shot key diode according to a first embodiment of the present invention, FIGS. 2 and 3 are plan views showing a photomask used for manufacturing the GaAs shot key diode shown in FIG. 4 is a plan view showing a GaAs shot key diode according to a second embodiment of the present invention; FIGS. 5 and 6 are plan views showing a photomask used for manufacturing the GaAs shot key diode shown in FIG. 4; FIG. 7 is a plan view showing a GaAs shot key diode according to a third embodiment of the present invention; FIGS. 8 and 9 are plan views showing a photomask using the fabrication of the GaAs shot key diode shown in FIG. 7; FIG. 10 is a plan view showing a surface two-electrode type Schottky diode according to a modified example of the present invention, and FIGS. 11 to 14 show photomasks used for manufacturing the surface two-electrode type Schottky diode shown in FIG. FIG. 15 is a cross-sectional view of a conventional pn junction diode, FIG. 16 is a cross-sectional view of a conventional Schottky diode, and FIG. 17 is a cross-sectional diagram of a conventional two-electrode Schottky diode. It is a diagram. In addition, in the symbols used in the drawings, 4, 5...Ohmic electrode, 6...PN junction, 7...Shotkey electrode, 8...Shotkey junction, 9...Ga
As chips, 10, 15... bonding pads, 11-14... photo masks.
Claims (1)
いる絶縁層と、上記半導体基板の複数の接合形成
領域に対応して上記絶縁層に設けられかつ互いに
大きさの異なる複数の開口と、上記絶縁層上に設
けられているボンデイング・パツドとをそれぞれ
具備し、上記ボンデイング・パツドと上記半導体
基板の上記複数の接合形成領域のうちのいずれか
一つの接合形成領域とを必要に応じて接続するこ
とにより、接合面積を所要の大きさとし得るよう
に構成したことを特徴とするダイオード。 a semiconductor substrate, an insulating layer provided on the semiconductor substrate, a plurality of openings provided in the insulating layer corresponding to the plurality of bond formation regions of the semiconductor substrate and having different sizes, and the insulating layer. bonding pads provided on the semiconductor substrate, and connecting the bonding pads to any one of the plurality of bond forming regions of the semiconductor substrate as necessary. , a diode characterized in that it is configured such that the junction area can be set to a required size.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985001530U JPS61119367U (en) | 1985-01-10 | 1985-01-10 | |
KR2019850013898U KR910004592Y1 (en) | 1985-01-10 | 1985-10-23 | Diode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985001530U JPS61119367U (en) | 1985-01-10 | 1985-01-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61119367U true JPS61119367U (en) | 1986-07-28 |
Family
ID=30474363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985001530U Pending JPS61119367U (en) | 1985-01-10 | 1985-01-10 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS61119367U (en) |
KR (1) | KR910004592Y1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013058232A1 (en) * | 2011-10-17 | 2013-04-25 | ローム株式会社 | Chip diode and diode package |
-
1985
- 1985-01-10 JP JP1985001530U patent/JPS61119367U/ja active Pending
- 1985-10-23 KR KR2019850013898U patent/KR910004592Y1/en not_active IP Right Cessation
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013058232A1 (en) * | 2011-10-17 | 2013-04-25 | ローム株式会社 | Chip diode and diode package |
JP2014029975A (en) * | 2011-10-17 | 2014-02-13 | Rohm Co Ltd | Chip diode and diode package |
US9054072B2 (en) | 2011-10-17 | 2015-06-09 | Rohm Co., Ltd. | Chip diode and diode package |
US9385093B2 (en) | 2011-10-17 | 2016-07-05 | Rohm Co., Ltd. | Chip diode and diode package |
US9659875B2 (en) | 2011-10-17 | 2017-05-23 | Rohm Co., Ltd. | Chip part and method of making the same |
US9773925B2 (en) | 2011-10-17 | 2017-09-26 | Rohm Co., Ltd. | Chip part and method of making the same |
US10164125B2 (en) | 2011-10-17 | 2018-12-25 | Rohm Co., Ltd. | Semiconductor device having first and second electrode layers electrically disconnected from each other by a slit |
US10593814B2 (en) | 2011-10-17 | 2020-03-17 | Rohm Co., Ltd. | Semiconductor device having first and second electrode layers electrically disconnected from each other by a slit |
Also Published As
Publication number | Publication date |
---|---|
KR910004592Y1 (en) | 1991-06-29 |
KR860010108U (en) | 1986-08-16 |
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