JPS61119252U - - Google Patents

Info

Publication number
JPS61119252U
JPS61119252U JP189985U JP189985U JPS61119252U JP S61119252 U JPS61119252 U JP S61119252U JP 189985 U JP189985 U JP 189985U JP 189985 U JP189985 U JP 189985U JP S61119252 U JPS61119252 U JP S61119252U
Authority
JP
Japan
Prior art keywords
chamber
vacuum pump
nozzle part
desolvation
evacuates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP189985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH046117Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP189985U priority Critical patent/JPH046117Y2/ja
Publication of JPS61119252U publication Critical patent/JPS61119252U/ja
Application granted granted Critical
Publication of JPH046117Y2 publication Critical patent/JPH046117Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP189985U 1985-01-11 1985-01-11 Expired JPH046117Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP189985U JPH046117Y2 (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP189985U JPH046117Y2 (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Publications (2)

Publication Number Publication Date
JPS61119252U true JPS61119252U (enrdf_load_stackoverflow) 1986-07-28
JPH046117Y2 JPH046117Y2 (enrdf_load_stackoverflow) 1992-02-20

Family

ID=30475064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP189985U Expired JPH046117Y2 (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Country Status (1)

Country Link
JP (1) JPH046117Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH046117Y2 (enrdf_load_stackoverflow) 1992-02-20

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