JPS61119085A - Carbon dioxide gas laser oscillator - Google Patents

Carbon dioxide gas laser oscillator

Info

Publication number
JPS61119085A
JPS61119085A JP23937184A JP23937184A JPS61119085A JP S61119085 A JPS61119085 A JP S61119085A JP 23937184 A JP23937184 A JP 23937184A JP 23937184 A JP23937184 A JP 23937184A JP S61119085 A JPS61119085 A JP S61119085A
Authority
JP
Japan
Prior art keywords
output
laser
laser beams
light
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23937184A
Other languages
Japanese (ja)
Inventor
Yoshinobu Maeda
佳伸 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP23937184A priority Critical patent/JPS61119085A/en
Publication of JPS61119085A publication Critical patent/JPS61119085A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/131Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/134Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)

Abstract

PURPOSE:To control the output of laser beams constantly without exerting a thermal influence on other positions by stabilizing a discharge state by dividing an active medium excitation system into a discharge for main excitation and a light excitation for control of the output. CONSTITUTION:When the output of laser beams decreases under the predetermined value, an intensity of a light source is enhanced while keeping a discharge for main excitation in a constant state thereby increasing a light energy. Then electrons are excited from a bottom level 10 to the upper laser level 9 which is concerned with laser oscillation among the light energy levels of CO2 by quantum mechanics and an excited state of a laser medium increases and the output of laser beams increases. When the output of laser beams increases over the predetermined value, an intensity of the light source is reduced to reduce the output of laser beams and minute variation of the output of laser beams is controlled so as to offer the output of laser beams of the predetermined intensity. A part of the output of laser beams is detected by a power sensor 6 and the signal is fed back to a control power source 3 of the light source 7 to control the intensity of the light source 7 thereby controlling the output of the laser beams 5.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は炭酸ガスなどのレーザ媒質を放電により励起
してレーザ光を出力する炭酸ガスレーザ発振装置、特に
その出力制御に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a carbon dioxide laser oscillation device that excites a laser medium such as carbon dioxide gas by discharge to output laser light, and particularly relates to its output control.

〔従来の技術〕[Conventional technology]

第3図は従来の炭酸ガスレーザ発振装置の説明図であシ
、図において、(1)はCo、 I COI o、 I
 N、IH・等を含有するレーザ媒質、(2)はとのレ
ーザ媒質(1)に電気エネルギーを与えるための1対の
放電電極、(3]は電極(2)に電気エネルギー(電流
)を供給するための電源、(4]はレーザ媒質(1)か
ら発生したレーザ光を増幅する共振器(1対のミラー)
 、(5)は出力したレーザ光、(6)はそのレーザ光
強度を測定するためのパワーセンナである。
FIG. 3 is an explanatory diagram of a conventional carbon dioxide laser oscillation device. In the figure, (1) represents Co, I COI o, I
A laser medium containing N, IH, etc., (2) a pair of discharge electrodes for supplying electrical energy to the laser medium (1), and (3) supplying electrical energy (current) to the electrode (2). (4) is a resonator (a pair of mirrors) that amplifies the laser light generated from the laser medium (1).
, (5) is the output laser beam, and (6) is a power sensor for measuring the intensity of the laser beam.

従来の炭酸ガスレーザ発振装置は上記のように構成され
、電源(3)から放電電極(2)に電流が供給され、こ
の電流により、放電電極(2)間でレーザ媒質(1)を
介して放電が生じ、レーザ媒質(1)に電気エネルギー
が与えられ、レーザ光発振可能な状態になる。次いで、
2枚のミラーで構成されている共振器(4)の間でレー
ザ光が増幅させられ、少し透過度を有する出力側のミラ
ー(4)からレーザ光(5)力出力されるようになって
いる。
A conventional carbon dioxide laser oscillation device is configured as described above, and a current is supplied from the power source (3) to the discharge electrode (2), and this current causes discharge to occur between the discharge electrodes (2) via the laser medium (1). occurs, electrical energy is given to the laser medium (1), and the state becomes capable of laser beam oscillation. Then,
The laser beam is amplified between the resonator (4), which is made up of two mirrors, and the laser beam (5) is output from the output side mirror (4), which has a little transparency. There is.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記のような従来の炭酸ガスレーザ発振装置では、レー
ザ光を安定に取り出すために、とのレーザ光の一部をパ
ワーセンサ(6)で検出し、それを電源(3)Kフィー
ドバックして電極(2)に印加する電流を制御している
。即ち、レーザ光の出力が設定値よりも減少した場合は
、印加電流を増加し、レーザ媒質の励起状態を増して、
レーザ光の出力を増加させ、逆にレーザ光の出力が設定
値よシも増加した場合は、印加電流を減少させて、レー
ザ光の出力を減少させている。
In the conventional carbon dioxide laser oscillation device as described above, in order to stably extract the laser light, a part of the laser light is detected by the power sensor (6), and it is fed back to the power supply (3) and connected to the electrode ( 2) The current applied to the circuit is controlled. That is, when the output of the laser beam decreases below the set value, the applied current is increased and the excited state of the laser medium is increased.
When the output of the laser beam is increased, and conversely, the output of the laser beam increases beyond the set value, the applied current is decreased to decrease the output of the laser beam.

この念め、従来の炭酸ガスレーザ発振装置では、レーザ
光の出力を制御するために、逐一印加電流を変化させな
ければならず、電極間の放電が不安定となるという問題
点かあつ念。また、印加電流電源と制御電源が独立して
いないので、両者がお互いに影響を受は易いという問題
点があった。また、気体放電であるので、電極間でよく
アーク放電が発生するが、この影響は直ぐに制御電源に
も及び、レーザ光の出力が変動するという問題点があっ
た。それから、放電による電気エネルギーの供給は、同
時に電極間に高温の熱をも発生する。
As a precaution, in conventional carbon dioxide laser oscillation devices, the applied current must be changed every time in order to control the laser light output, which causes the problem that the discharge between the electrodes becomes unstable. Furthermore, since the applied current power source and the control power source are not independent, there is a problem that they are easily influenced by each other. Further, since it is a gas discharge, arc discharge often occurs between the electrodes, but this influence immediately affects the control power supply, causing a problem in that the output of the laser light fluctuates. Furthermore, the supply of electrical energy through discharge also generates high-temperature heat between the electrodes.

従って、レーザ光の出力が低下し、印加電流制御によシ
過剰電流が電極に印加された場合、より高い熱が発生し
、共振器のミラー等に熱の影響が伝わシ、レーザ光の出
力やそ−ドが変動するという問題点があった。また、放
電によりCO,がcOに解離して、レーザ光の出力が時
間とともに減少するガス劣力現象があるという問題点が
あった。
Therefore, if the output of the laser beam decreases and an excessive current is applied to the electrode by controlling the applied current, higher heat will be generated and the effect of the heat will be transmitted to the mirrors of the resonator, etc., and the output of the laser beam will be reduced. There was a problem that the source code fluctuated. Further, there is a problem in that CO, dissociates into cO due to discharge, resulting in a gas deterioration phenomenon in which the output of the laser light decreases over time.

この発明は、かかる問題点を解決するためになされたも
ので、放電状態を安定にし、熱的影響を他の箇所に与え
ずにレーザ光の出力を一定に制御できる出力制御機構を
有した炭酸ガスレーザ発振装置を得ることを目的とする
This invention was made in order to solve these problems, and it is a carbon dioxide carbon dioxide carbon dioxide having an output control mechanism that can stabilize the discharge state and control the output of laser light at a constant level without giving any thermal influence to other parts. The purpose is to obtain a gas laser oscillation device.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る炭酸ガスレーザ発振装置は、少なくとも
Cog m N!を含有するレーザ媒質を放電によって
励起させてレーザ光を出力させる炭酸ガスレーザ発掘装
置において、前記レーザ媒質に光を照射してこのレーザ
媒質を励起させる光源と、この光源の出力を前記レーザ
光の出力に基づいて制御する制御装置とを設けたもので
ある。
The carbon dioxide laser oscillation device according to the present invention has at least Cog m N! In a carbon dioxide laser excavation device that outputs laser light by exciting a laser medium containing a by discharge, there is provided a light source that excites the laser medium by irradiating the laser medium with light, and an output of the light source that is the output of the laser light. The system is equipped with a control device that performs control based on the following.

〔作 用〕[For production]

この発明においては、レーザ媒質に光を照射してこのレ
ーザ媒質を励起させる光源と、この光源の出力をレーザ
光の出力に基、づいて制御する制御装置とを設けている
ので、放電の条件が変動しても、光源から出力される光
によってレーザ媒質が励起され、レーザ光の出力強度が
一定値に維持される。
In this invention, since a light source that irradiates light onto a laser medium to excite the laser medium and a control device that controls the output of this light source based on the output of the laser beam are provided, the discharge conditions are Even if the value varies, the laser medium is excited by the light output from the light source, and the output intensity of the laser light is maintained at a constant value.

〔実施例〕〔Example〕

第1図はこの発明の一実施例を示す説明図であ!0 、
 (1)はCO2+ Co + 02 + Heなどか
らなるレーザ媒質、(2)はこのレーザ媒質(1)K電
気エネルギーを与えるための1対の放電電極、(3)は
電極(2)に電気エネルギー(を流)を供給するための
電源、(4)はレーザ媒質(1)から発生したレーザ光
を増幅する共振器(1対のミラー)、αつは出力された
レーザ光、(6)はそのレーザ光の出力強度を測定する
ためのパワーセンサである。そして、(7)はレーザ媒
質(1)に光エネルギーを与えるために設けられた光源
であり、(8)は、パワーセンサ(6)からフィードバ
ックされた信号によって光源(7)の出力を制御する之
めの制御電源であ慝。
FIG. 1 is an explanatory diagram showing one embodiment of this invention! 0,
(1) is a laser medium consisting of CO2+ Co + 02 + He, etc.; (2) is this laser medium; (1) is a pair of discharge electrodes for providing K electrical energy; (3) is a laser medium that supplies electrical energy to electrode (2). (4) is a resonator (a pair of mirrors) that amplifies the laser light generated from the laser medium (1), α is the output laser light, (6) is This is a power sensor for measuring the output intensity of the laser beam. And (7) is a light source provided to give optical energy to the laser medium (1), and (8) controls the output of the light source (7) by the signal fed back from the power sensor (6). This is the control power supply.

上記のように構成された炭酸ガスレーザ発振装置におい
て、レーザ光の出力が設定値よシも減少した場合は、主
励起放電は一定の状態にしたまま、光源の強度を増し、
光エネルギーを増加させると、第2図に示すように、量
子力学的にco!のエネルギ一単位の中でレーザ発振に
関与する上のレーザ単位(9)に基底単位(至)から電
子が励起され、レーザ媒質の励起状態が増加し、レーザ
光の出力が増加させられ、逆にル−ザ光の出力が設定値
よりも増加し免場合は、光源の強度を減らし、レーザ光
の出力力−テ少させられ、これKよシ、レーザ光の出力
の微小ン、変動が制御され、設定した強度のレーザ光の
出力、−ム・′与られる。ここで、レーザ光の出力の一
部をパワーセンサ(6)で検出し、その信号を光源(7
)の制御電源″1.こ゛−イードバックさせ、光源(7
)の強度を制御すると、  ザ光(5)の出方が制御さ
れる。また、レーザ光の1.・の制御は、放tKよりて
CO2がCOに解離してし −7発振に関為しな〈なり
、レーザ光の出力が減少する効果を考慮して、上記光エ
ネルギーの大きさをCoが再び酸化してco2に戻るの
に必要な大きさに選定して行なうか、また、N2を励起
することにより 、Cotの上のレーザ単位の数が増加
し、レーザ光の出力が増加する効果を考慮して、上記光
エネルギーの大きさをN!を励起するのに必要な大きさ
に選定して行なうO 〔発明(の効果〕 以上のように、この発明(によれば、活性媒体励起機構
を主励起用の放電と出力制御用の光励起に分離させたの
で、主励起用の放電を一定にしたままレーザ光の出力制
御ができ、光の振動数(即ち光のエネルギーの大きさ)
を熱的に影響が少ないものに選定すれば、ミラー等の他
の箇所に熱の影響を与えずに効率のよいレーザ光の出力
制御かで−・  きる。また、光エネルギーの大きさを
選定すれば、放電によってCo雪がCOK解離してレー
ザ光の出力が減少するガス劣化作用を防ぐことができ、
封じ切シ型炭酸ガスレーザ発振装置では、封じ切り時間
が大巾に伸びる。
In the carbon dioxide laser oscillator configured as described above, if the output of the laser light decreases beyond the set value, the intensity of the light source is increased while the main excitation discharge remains constant.
As the light energy increases, as shown in Figure 2, quantum mechanically co! Within one unit of energy, electrons are excited from the base unit (to) to the upper laser unit (9) involved in laser oscillation, the excited state of the laser medium increases, the output of the laser light increases, and vice versa. If the laser light output does not increase more than the set value, reduce the intensity of the light source and reduce the output power of the laser light. A laser beam output of a controlled and set intensity is given. Here, a part of the output of the laser beam is detected by the power sensor (6), and the signal is sent to the light source (7).
) control power supply ``1.
), the way the light (5) is emitted is controlled. In addition, 1. The above control is based on the fact that CO2 dissociates into CO due to emission tK and is not involved in -7 oscillation, thus reducing the output of the laser beam. Either the size is selected to be large enough to oxidize and return to CO2, or by exciting N2, the number of laser units on the Cot increases and the output of the laser light increases. Taking into consideration, the magnitude of the above light energy is N! [Effects of the Invention] As described above, according to the present invention, the active medium excitation mechanism can be divided into discharge for main excitation and optical excitation for output control. Because they are separated, the output of the laser light can be controlled while keeping the discharge for main excitation constant, and the frequency of the light (i.e., the magnitude of the light energy) can be controlled.
By selecting one that has little thermal influence, it is possible to efficiently control the output of the laser beam without affecting other parts such as the mirror. In addition, by selecting the magnitude of the light energy, it is possible to prevent the gas deterioration effect that causes the Co snow to dissociate into COK due to discharge and reduce the output of the laser light.
In a sealed cut-off type carbon dioxide laser oscillator, the cut-off time is significantly extended.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例による炭酸ガスレーザ発振
装置を示す説明図、第2図はCO2とN2のエネルギー
準位を説明する図、第3図は従来の印加電流出力制御型
炭酸ガスレーザ装置を示す説明図である。 図において、(1)はレーザ媒質、(2)は電極、(3
)は電源、(4)は共振器、(5)はレーザ光、(6)
はパワーセンサ、(7)は光源、(8)は制御電源、(
9)はCO2の上のレーザ単位、αOはCo鵞の基底単
位である。 なお、各図中、同一符号は同一、又は相当部分を示す。 代理人 弁理士  木 村 三 朗 第1vA 2 を駒 3、*+弘 4 吠狐翳 5 : レーイー七〇 8 ・シ櫓?セ凛 第2 図
FIG. 1 is an explanatory diagram showing a carbon dioxide laser oscillation device according to an embodiment of the present invention, FIG. 2 is a diagram explaining the energy levels of CO2 and N2, and FIG. 3 is a conventional applied current output control type carbon dioxide laser device. FIG. In the figure, (1) is the laser medium, (2) is the electrode, and (3
) is the power supply, (4) is the resonator, (5) is the laser beam, (6)
is a power sensor, (7) is a light source, (8) is a control power source, (
9) is the laser unit above CO2, and αO is the base unit of Co. In each figure, the same reference numerals indicate the same or equivalent parts. Agent Patent Attorney Sanro Kimura 1st vA 2 piece 3, * + Hiroshi 4 Hōko 5: Rei 708 ・Shiyagura? Serin Figure 2

Claims (2)

【特許請求の範囲】[Claims] (1)少なくともCO_2、N_2を含有するレーザ媒
質を放電によつて励起させてレーザ光を出力させる炭酸
ガスレーザ発振装置において、前記レーザ媒質に光を照
射してこのレーザ媒質を励起させる光源と、この光源の
出力を前記レーザ光の出力に基づいて制御する制御装置
とを設けたことを特徴とする炭酸ガスレーザ発振装置。
(1) In a carbon dioxide laser oscillation device that excites a laser medium containing at least CO_2 and N_2 by discharge to output laser light, a light source that excites the laser medium by irradiating the laser medium with light; A carbon dioxide laser oscillation device comprising: a control device that controls the output of a light source based on the output of the laser beam.
(2)前記光源が出力する光の振動数を任意に選択可能
に構成していることを特徴とする特許請求の範囲第1項
に記載の炭酸ガスレーザ発振装置。
(2) The carbon dioxide laser oscillation device according to claim 1, wherein the frequency of the light outputted by the light source can be arbitrarily selected.
JP23937184A 1984-11-15 1984-11-15 Carbon dioxide gas laser oscillator Pending JPS61119085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23937184A JPS61119085A (en) 1984-11-15 1984-11-15 Carbon dioxide gas laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23937184A JPS61119085A (en) 1984-11-15 1984-11-15 Carbon dioxide gas laser oscillator

Publications (1)

Publication Number Publication Date
JPS61119085A true JPS61119085A (en) 1986-06-06

Family

ID=17043772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23937184A Pending JPS61119085A (en) 1984-11-15 1984-11-15 Carbon dioxide gas laser oscillator

Country Status (1)

Country Link
JP (1) JPS61119085A (en)

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