JPS61117252U - - Google Patents

Info

Publication number
JPS61117252U
JPS61117252U JP20213584U JP20213584U JPS61117252U JP S61117252 U JPS61117252 U JP S61117252U JP 20213584 U JP20213584 U JP 20213584U JP 20213584 U JP20213584 U JP 20213584U JP S61117252 U JPS61117252 U JP S61117252U
Authority
JP
Japan
Prior art keywords
film
shuttle
semiconductor element
air pressure
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20213584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0128681Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20213584U priority Critical patent/JPH0128681Y2/ja
Publication of JPS61117252U publication Critical patent/JPS61117252U/ja
Application granted granted Critical
Publication of JPH0128681Y2 publication Critical patent/JPH0128681Y2/ja
Expired legal-status Critical Current

Links

JP20213584U 1984-12-28 1984-12-28 Expired JPH0128681Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20213584U JPH0128681Y2 (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20213584U JPH0128681Y2 (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61117252U true JPS61117252U (enrdf_load_stackoverflow) 1986-07-24
JPH0128681Y2 JPH0128681Y2 (enrdf_load_stackoverflow) 1989-08-31

Family

ID=30764571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20213584U Expired JPH0128681Y2 (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH0128681Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0128681Y2 (enrdf_load_stackoverflow) 1989-08-31

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