JPS61117247U - - Google Patents

Info

Publication number
JPS61117247U
JPS61117247U JP22985U JP22985U JPS61117247U JP S61117247 U JPS61117247 U JP S61117247U JP 22985 U JP22985 U JP 22985U JP 22985 U JP22985 U JP 22985U JP S61117247 U JPS61117247 U JP S61117247U
Authority
JP
Japan
Prior art keywords
semiconductor
cleaning liquid
valve
outlet side
supply pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP22985U priority Critical patent/JPS61117247U/ja
Publication of JPS61117247U publication Critical patent/JPS61117247U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP22985U 1985-01-08 1985-01-08 Pending JPS61117247U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22985U JPS61117247U (enrdf_load_stackoverflow) 1985-01-08 1985-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22985U JPS61117247U (enrdf_load_stackoverflow) 1985-01-08 1985-01-08

Publications (1)

Publication Number Publication Date
JPS61117247U true JPS61117247U (enrdf_load_stackoverflow) 1986-07-24

Family

ID=30471900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22985U Pending JPS61117247U (enrdf_load_stackoverflow) 1985-01-08 1985-01-08

Country Status (1)

Country Link
JP (1) JPS61117247U (enrdf_load_stackoverflow)

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