JPS61115967U - - Google Patents

Info

Publication number

JPS61115967U

JPS61115967U JP20108584U JP20108584U JPS61115967U JP S61115967 U JPS61115967 U JP S61115967U JP 20108584 U JP20108584 U JP 20108584U JP 20108584 U JP20108584 U JP 20108584U JP S61115967 U JPS61115967 U JP S61115967U

Authority

JP

Japan

Prior art keywords

glass plate

silicon wafer

gas chromatography

wafer

electrodepositing

Prior art date

1984-12-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011521 glass Substances 0.000 claims description 6
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
• 229910052710 silicon Inorganic materials 0.000 claims 3
• 239000010703 silicon Substances 0.000 claims 3
• 238000004817 gas chromatography Methods 0.000 claims 2
• 238000004070 electrodeposition Methods 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1