JPS61115102U - - Google Patents
Info
- Publication number
- JPS61115102U JPS61115102U JP20077084U JP20077084U JPS61115102U JP S61115102 U JPS61115102 U JP S61115102U JP 20077084 U JP20077084 U JP 20077084U JP 20077084 U JP20077084 U JP 20077084U JP S61115102 U JPS61115102 U JP S61115102U
- Authority
- JP
- Japan
- Prior art keywords
- ultra
- high vacuum
- equipment
- adsorption
- vacuum equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20077084U JPS61115102U (enExample) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20077084U JPS61115102U (enExample) | 1984-12-27 | 1984-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61115102U true JPS61115102U (enExample) | 1986-07-21 |
Family
ID=30761930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20077084U Pending JPS61115102U (enExample) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61115102U (enExample) |
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1984
- 1984-12-27 JP JP20077084U patent/JPS61115102U/ja active Pending