JPS61114839U - - Google Patents

Info

Publication number
JPS61114839U
JPS61114839U JP19799284U JP19799284U JPS61114839U JP S61114839 U JPS61114839 U JP S61114839U JP 19799284 U JP19799284 U JP 19799284U JP 19799284 U JP19799284 U JP 19799284U JP S61114839 U JPS61114839 U JP S61114839U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
semiconductor
suctions
vacuum
holds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19799284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19799284U priority Critical patent/JPS61114839U/ja
Publication of JPS61114839U publication Critical patent/JPS61114839U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
JP19799284U 1984-12-28 1984-12-28 Pending JPS61114839U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19799284U JPS61114839U (US20020051482A1-20020502-M00012.png) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19799284U JPS61114839U (US20020051482A1-20020502-M00012.png) 1984-12-28 1984-12-28

Publications (1)

Publication Number Publication Date
JPS61114839U true JPS61114839U (US20020051482A1-20020502-M00012.png) 1986-07-19

Family

ID=30756607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19799284U Pending JPS61114839U (US20020051482A1-20020502-M00012.png) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPS61114839U (US20020051482A1-20020502-M00012.png)

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