JPS61114831U - - Google Patents

Info

Publication number
JPS61114831U
JPS61114831U JP1984199363U JP19936384U JPS61114831U JP S61114831 U JPS61114831 U JP S61114831U JP 1984199363 U JP1984199363 U JP 1984199363U JP 19936384 U JP19936384 U JP 19936384U JP S61114831 U JPS61114831 U JP S61114831U
Authority
JP
Japan
Prior art keywords
frame
presser
moving body
moving
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984199363U
Other languages
English (en)
Japanese (ja)
Other versions
JPH029555Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984199363U priority Critical patent/JPH029555Y2/ja
Publication of JPS61114831U publication Critical patent/JPS61114831U/ja
Application granted granted Critical
Publication of JPH029555Y2 publication Critical patent/JPH029555Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • H10W72/07141—

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP1984199363U 1984-12-28 1984-12-28 Expired JPH029555Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984199363U JPH029555Y2 (enExample) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984199363U JPH029555Y2 (enExample) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61114831U true JPS61114831U (enExample) 1986-07-19
JPH029555Y2 JPH029555Y2 (enExample) 1990-03-09

Family

ID=30759216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984199363U Expired JPH029555Y2 (enExample) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH029555Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023121542A (ja) * 2022-02-21 2023-08-31 三菱電機株式会社 半導体製造装置及び半導体製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023121542A (ja) * 2022-02-21 2023-08-31 三菱電機株式会社 半導体製造装置及び半導体製造方法

Also Published As

Publication number Publication date
JPH029555Y2 (enExample) 1990-03-09

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