JPS61113755A - Manufacture of metallic material with thermal sprayed ceramic film having high corrosion and heat resistance - Google Patents
Manufacture of metallic material with thermal sprayed ceramic film having high corrosion and heat resistanceInfo
- Publication number
- JPS61113755A JPS61113755A JP59237147A JP23714784A JPS61113755A JP S61113755 A JPS61113755 A JP S61113755A JP 59237147 A JP59237147 A JP 59237147A JP 23714784 A JP23714784 A JP 23714784A JP S61113755 A JPS61113755 A JP S61113755A
- Authority
- JP
- Japan
- Prior art keywords
- film
- metallic material
- coating
- thermal sprayed
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/18—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
Abstract
Description
【発明の詳細な説明】
[1゛ζ業十の利用分野]
この発明は、耐蝕性に優れたセラミック溶射破膜を形成
した金属材の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Fields of Application of 1゛ζ Industry] The present invention relates to a method for manufacturing a metal material having a ceramic sprayed rupture film formed thereon with excellent corrosion resistance.
各種の腐蝕性金属材の表面に耐腐蝕性 耐薬品性に(n
れた金属或いは、合金又はセラミック被膜を形成させ、
前記金属材を腐蝕、或いは藁品による侵蝕から防護する
ことが日常行われている。Corrosion resistant and chemical resistant (n
forming a metal, alloy or ceramic coating,
It is a common practice to protect the metal materials from corrosion or attack by straw products.
金属材へのこれらの耐蝕性、或いは耐薬品性被膜の形成
手段として、メッキ或いは茎着等の手段の外、溶射によ
る被膜形成法が最近盛んに行われるようになった。As a means of forming these corrosion-resistant or chemical-resistant coatings on metal materials, in addition to methods such as plating or adhesion, coating formation methods by thermal spraying have recently become popular.
しかし、かかる溶射による被膜形成法は、他の被膜形成
法、例えばメッキ法或いは蒸着法に比べて極めて筒便容
易であり、又、セラミックの如き極めて高融点勧賞をも
被膜形成材として選択し得る利点がある反面、被膜層内
に多数の微細気孔が存在し、これが被膜強度を劣化させ
ると共に耐蝕性・耐薬品性劣化の原因となっている。However, the method of forming a film by thermal spraying is extremely convenient compared to other methods of forming a film, such as plating or vapor deposition, and it is also possible to select materials with extremely high melting points such as ceramics as the material for forming the film. Although there are advantages, there are many fine pores in the coating layer, which deteriorate the coating strength and cause deterioration in corrosion resistance and chemical resistance.
このような溶射被膜を有する金属材を腐蝕や薬品侵蝕か
ら防護するために、プラスチック等の1fFL剤によっ
て前記気孔を充填する封孔処理が一般になされている。In order to protect metal materials having such thermal sprayed coatings from corrosion and chemical attack, pore sealing treatment is generally performed in which the pores are filled with a 1fFL agent such as plastic.
又、被膜と金属基体とをその界面において合金化し、被
膜密着性を向上させるために電子ビーム、或いはプラズ
マアークによる熱処理法が特開昭56−112458号
公報に記載されている。Further, JP-A-56-112458 discloses a heat treatment method using an electron beam or plasma arc to alloy the coating and the metal substrate at their interface and improve coating adhesion.
しかし、これらの公知の被膜処理法においては、高真空
の保持等複雑な設備を必要とし、又、広い面積のイ容射
面を処理することは不適当である。However, these known film processing methods require complicated equipment such as maintaining a high vacuum, and are not suitable for processing a large area of radiation surface.
本発明は、上記のような欠点のない大面積の被膜処理を
も極めて容易に 且つ安価になしえるセラミック熔射被
11りの処理方法を提供することを目的になされたもの
である。The present invention has been made for the purpose of providing a method for treating a ceramic spray coating 11, which does not have the above-mentioned drawbacks and can process a large area of coating very easily and at low cost.
C問題点を解決するための手段〕
以下更に、上記問題点を解決するための手段を具体的に
説明する。Means for Solving Problem C] Hereinafter, means for solving the above problem will be specifically explained.
本発明において適用される金属材は、特に限定されるも
のではなく、鉄鋼、ニッケル、f同、Jハルト、チタニ
ウム、ジルコニウム等の金属、或いはそれらの合金を使
用対象に応じて任意に選ぶことができるが、融点の低い
Zn+Sn等は溶融し易いので、あまり適当とは言えな
い。The metal material to be applied in the present invention is not particularly limited, and metals such as steel, nickel, metal, titanium, zirconium, etc., or alloys thereof may be arbitrarily selected depending on the intended use. Although it is possible, Zn+Sn, etc., which have a low melting point, are easily melted, so it is not very suitable.
本発明において、上記金属材表面に溶射により形成する
べき被膜材は、A1203 、7i02.5iQ2
。In the present invention, the coating material to be formed on the surface of the metal material by thermal spraying is A1203, 7i02.5iQ2.
.
或いは各種金属の窒化物、或いは炭化物の1種、又は2
種以上を必要に応じて任意に選択使用される。Or one or two nitrides or carbides of various metals.
More than one species can be selected and used as needed.
以下、本発明において上記した被膜材を総称して単にセ
ラミックと表現する。Hereinafter, in the present invention, the above-mentioned coating materials will be collectively referred to simply as ceramic.
上記したセラミックはプラズマ溶射法、アーク溶射法、
或いはガス火炎溶射法等により、予めショツトブラスト
等公知の前処理にて溶射に適した表面状態に清浄化した
金属材表面に被覆される。The above ceramics can be manufactured by plasma spraying, arc spraying,
Alternatively, it is coated by a gas flame spraying method or the like on the surface of a metal material that has been previously cleaned to a surface condition suitable for thermal spraying through a known pretreatment such as shot blasting.
このようにして形成されるセラミック溶射被膜の厚みは
、特に限定されるものではなく使用対象に応じて、例え
ば、50μm、300μm等任意に選ぶことができる。The thickness of the ceramic sprayed coating thus formed is not particularly limited, and can be arbitrarily selected, such as 50 μm or 300 μm, depending on the intended use.
上記の如くにして得られたセラミック溶射被覆金属材は
、不活性雰囲気中においてレーザービームを照射して被
膜層の溶融処理を行なう。The ceramic spray-coated metal material obtained as described above is irradiated with a laser beam in an inert atmosphere to melt the coating layer.
本発明におけるレーザービームによる照射処理雰囲気は
、Arガス等の不活性雰囲気であることが必要で、空気
中等の酸化性雰囲気では、レーザービーム照射によって
発生する熱が、例えば、1000〜2000℃、或いは
それ以上の高温となるために被膜材の燃焼消滅等の危険
がある。又、COガス、或いはN2ガス等の還元雰囲気
では、セラミック被 、1.[
膜材が還元変質される。The atmosphere for the laser beam irradiation treatment in the present invention needs to be an inert atmosphere such as Ar gas, and in an oxidizing atmosphere such as air, the heat generated by the laser beam irradiation is, for example, 1000 to 2000°C, or Since the temperature is higher than that, there is a danger that the coating material will burn out and disappear. In addition, in a reducing atmosphere such as CO gas or N2 gas, ceramic coatings, 1. [
The membrane material is reduced and altered.
従って、本発明においてレーザービーム照射処理時の雰
囲気は、不活性ガス雰囲気とされる。Therefore, in the present invention, the atmosphere during the laser beam irradiation treatment is an inert gas atmosphere.
本発明における上記雰囲気のガスは、Arガス、或いは
C02ガス、或いはこれらの混合が最も好ましいが、N
2ガスを雰囲気ガスとするときは、窒化物の生成があり
、窒化物の生成の好ましくない場合は、雰囲気ガス中の
N2の存在を避けるよう心掛けねばならない。The gas in the above atmosphere in the present invention is most preferably Ar gas, CO2 gas, or a mixture thereof, but N
When two gases are used as the atmospheric gas, nitrides are generated, and if the formation of nitrides is undesirable, care must be taken to avoid the presence of N2 in the atmospheric gas.
又、上記不活性ガス雰囲気におけるレーザービーム処理
に際しては、金属材を予め350℃に加熱し、この温度
に保持せしめる事により一層良質の処理結果を得ること
ができる。Further, when performing the laser beam treatment in the above-mentioned inert gas atmosphere, better quality treatment results can be obtained by preheating the metal material to 350° C. and maintaining it at this temperature.
本発明における上記溶射被膜へ照射されるレーザーの種
類は、特に限定されるものではないが、例えばCO2レ
ーザー等任意に選ぶことができる。The type of laser used to irradiate the thermally sprayed coating in the present invention is not particularly limited, but can be arbitrarily selected, such as a CO2 laser.
又、レーザー等の照射による加熱温度は、被膜材の融点
直上付近が最も好適であり、セラミック溶射被膜が溶融
融着するように処理される。Furthermore, the heating temperature by irradiation with a laser or the like is most preferably approximately just above the melting point of the coating material, so that the ceramic sprayed coating is melted and fused.
本発明のセラミック溶射の処理法は、上記の如くである
ので、レーザービーム照射による発生熱が極めて高温で
あるにもかかわらず、被膜変質のない溶融膜が形成され
、従来被膜層内に抱藏されていた多数の微細気孔は消滅
され、被膜温度の向上と共に緻密化され耐蝕性を著しく
向上することができた。Since the ceramic thermal spraying treatment method of the present invention is as described above, a molten film is formed without film deterioration even though the heat generated by laser beam irradiation is extremely high. The many fine pores that had been present in the coating disappeared, and as the coating temperature increased, the coating became denser and corrosion resistance was significantly improved.
本発明のセラミック溶射被膜のレーザービーム溶射処理
方法は、上記の如くであるが、以下更にその実施例につ
いて述べる。The method for laser beam thermal spraying of a ceramic thermal spray coating according to the present invention is as described above, and further examples thereof will be described below.
鋼板表面をノヨノトブラストにより溶射被膜形成に適す
る表面性状に清浄した後、これに第1表に示した組成の
セラミック溶射材を、プラズマアーク溶射法により 1
00μmの厚さに溶射被膜を形成させた。After the surface of the steel plate was cleaned by Noyonoto blasting to a surface quality suitable for forming a sprayed coating, a ceramic spraying material having the composition shown in Table 1 was applied to it by plasma arc spraying.
A sprayed coating was formed to a thickness of 0.00 μm.
第1表
上記セラミック溶射鋼板の溶射被膜層中に、Arガスを
充填した容器中において、5に御出力のCO2レーザ−
ビームを0.07m /+min の速度にて照射し
、加熱溶融せしめた。Table 1 A CO2 laser with an output of about 50% was applied to the sprayed coating layer of the above ceramic sprayed steel sheet in a container filled with Ar gas.
The beam was irradiated at a speed of 0.07 m /+min to heat and melt.
かくて得られた処理被膜は、被膜形成の溶射粒が溶融融
着され、しかも被膜層内に抱藏されていた微細気孔は殆
ど消滅されており、更にこの処理鋼板の塩水噴霧試験(
JISZ2371)を行ったが、未処理の溶射鋼板に比
べ著しい耐蝕性向上を得ることができた。In the treated coating obtained in this way, the thermal spray particles forming the coating were melted and fused, and the fine pores that had been enclosed within the coating layer were almost completely eliminated.
JIS Z2371) was conducted, and the corrosion resistance was significantly improved compared to untreated thermal sprayed steel sheets.
Claims (1)
雰囲気中で、前記溶射被膜にレーザービームを照射し、
該被膜を溶融処理することを特徴とする高耐蝕・耐熱性
セラミック溶射被膜形成金属材の製造方法。1. After forming a ceramic spray coating on the surface of a metal material, irradiating the spray coating with a laser beam in an inert atmosphere,
A method for producing a highly corrosion-resistant and heat-resistant ceramic thermal spray coating-forming metal material, the method comprising melting the coating.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59237147A JPS61113755A (en) | 1984-11-09 | 1984-11-09 | Manufacture of metallic material with thermal sprayed ceramic film having high corrosion and heat resistance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59237147A JPS61113755A (en) | 1984-11-09 | 1984-11-09 | Manufacture of metallic material with thermal sprayed ceramic film having high corrosion and heat resistance |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61113755A true JPS61113755A (en) | 1986-05-31 |
Family
ID=17011100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59237147A Pending JPS61113755A (en) | 1984-11-09 | 1984-11-09 | Manufacture of metallic material with thermal sprayed ceramic film having high corrosion and heat resistance |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61113755A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1112460C (en) * | 1998-04-17 | 2003-06-25 | 清华大学 | Method of preparing ceramic coating by laser smelting coating after metal surface plasma spray |
EP1780298A1 (en) * | 2005-07-29 | 2007-05-02 | Tocalo Co. Ltd. | Y2o3 thermal sprayed film coated member and process for producing the same |
JP2009185318A (en) * | 2008-02-05 | 2009-08-20 | Tocalo Co Ltd | Thermal spray coating member having excellent appearance, and its manufacturing method |
US7648782B2 (en) | 2006-03-20 | 2010-01-19 | Tokyo Electron Limited | Ceramic coating member for semiconductor processing apparatus |
US7767268B2 (en) | 2005-09-08 | 2010-08-03 | Tocalo Co., Ltd. | Spray-coated member having an excellent resistance to plasma erosion and method of producing the same |
JP2010229492A (en) * | 2009-03-27 | 2010-10-14 | Tocalo Co Ltd | Method for modifying surface of white yttrium oxide thermal-sprayed film, and member coated with yttrium oxide thermal-sprayed film |
JP2010229491A (en) * | 2009-03-27 | 2010-10-14 | Tocalo Co Ltd | Method for whitening black surface of yttrium oxide thermal-sprayed film, and member coated with white yttrium oxide thermal-sprayed film |
US7850864B2 (en) | 2006-03-20 | 2010-12-14 | Tokyo Electron Limited | Plasma treating apparatus and plasma treating method |
US8231986B2 (en) | 2005-08-22 | 2012-07-31 | Tocalo Co., Ltd. | Spray coating member having excellent injury resistance and so on and method for producing the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5518575A (en) * | 1978-07-28 | 1980-02-08 | Komatsu Ltd | Surface treating method |
-
1984
- 1984-11-09 JP JP59237147A patent/JPS61113755A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5518575A (en) * | 1978-07-28 | 1980-02-08 | Komatsu Ltd | Surface treating method |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1112460C (en) * | 1998-04-17 | 2003-06-25 | 清华大学 | Method of preparing ceramic coating by laser smelting coating after metal surface plasma spray |
EP1780298A1 (en) * | 2005-07-29 | 2007-05-02 | Tocalo Co. Ltd. | Y2o3 thermal sprayed film coated member and process for producing the same |
EP1780298A4 (en) * | 2005-07-29 | 2009-01-07 | Tocalo Co Ltd | Y2o3 thermal sprayed film coated member and process for producing the same |
US7494723B2 (en) | 2005-07-29 | 2009-02-24 | Tocalo Co., Ltd. | Y2O3 spray-coated member and production method thereof |
EP2071049A1 (en) * | 2005-07-29 | 2009-06-17 | Tocalo Co. Ltd. | Y2O3 Spray-coated member and production method thereof |
US8231986B2 (en) | 2005-08-22 | 2012-07-31 | Tocalo Co., Ltd. | Spray coating member having excellent injury resistance and so on and method for producing the same |
US8053058B2 (en) | 2005-09-08 | 2011-11-08 | Tocalo Co., Ltd. | Spray-coated member having an excellent resistance to plasma erosion and method of producing the same |
US7767268B2 (en) | 2005-09-08 | 2010-08-03 | Tocalo Co., Ltd. | Spray-coated member having an excellent resistance to plasma erosion and method of producing the same |
US7648782B2 (en) | 2006-03-20 | 2010-01-19 | Tokyo Electron Limited | Ceramic coating member for semiconductor processing apparatus |
US7850864B2 (en) | 2006-03-20 | 2010-12-14 | Tokyo Electron Limited | Plasma treating apparatus and plasma treating method |
JP2009185318A (en) * | 2008-02-05 | 2009-08-20 | Tocalo Co Ltd | Thermal spray coating member having excellent appearance, and its manufacturing method |
JP2010229491A (en) * | 2009-03-27 | 2010-10-14 | Tocalo Co Ltd | Method for whitening black surface of yttrium oxide thermal-sprayed film, and member coated with white yttrium oxide thermal-sprayed film |
JP2010229492A (en) * | 2009-03-27 | 2010-10-14 | Tocalo Co Ltd | Method for modifying surface of white yttrium oxide thermal-sprayed film, and member coated with yttrium oxide thermal-sprayed film |
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