JPS61113725U - - Google Patents

Info

Publication number
JPS61113725U
JPS61113725U JP20192984U JP20192984U JPS61113725U JP S61113725 U JPS61113725 U JP S61113725U JP 20192984 U JP20192984 U JP 20192984U JP 20192984 U JP20192984 U JP 20192984U JP S61113725 U JPS61113725 U JP S61113725U
Authority
JP
Japan
Prior art keywords
slope
table lifter
conveyance
lifter
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20192984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20192984U priority Critical patent/JPS61113725U/ja
Publication of JPS61113725U publication Critical patent/JPS61113725U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP20192984U 1984-12-26 1984-12-26 Pending JPS61113725U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20192984U JPS61113725U (zh) 1984-12-26 1984-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20192984U JPS61113725U (zh) 1984-12-26 1984-12-26

Publications (1)

Publication Number Publication Date
JPS61113725U true JPS61113725U (zh) 1986-07-18

Family

ID=30764173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20192984U Pending JPS61113725U (zh) 1984-12-26 1984-12-26

Country Status (1)

Country Link
JP (1) JPS61113725U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006096498A (ja) * 2004-09-29 2006-04-13 Shimadzu Corp 基板搬送装置およびこれを備える真空処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5647822B2 (zh) * 1977-08-10 1981-11-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5647822B2 (zh) * 1977-08-10 1981-11-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006096498A (ja) * 2004-09-29 2006-04-13 Shimadzu Corp 基板搬送装置およびこれを備える真空処理装置
JP4581602B2 (ja) * 2004-09-29 2010-11-17 株式会社島津製作所 真空処理装置

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