JPS61113725U - - Google Patents
Info
- Publication number
- JPS61113725U JPS61113725U JP20192984U JP20192984U JPS61113725U JP S61113725 U JPS61113725 U JP S61113725U JP 20192984 U JP20192984 U JP 20192984U JP 20192984 U JP20192984 U JP 20192984U JP S61113725 U JPS61113725 U JP S61113725U
- Authority
- JP
- Japan
- Prior art keywords
- slope
- table lifter
- conveyance
- lifter
- load
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Special Conveying (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20192984U JPS61113725U (da) | 1984-12-26 | 1984-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20192984U JPS61113725U (da) | 1984-12-26 | 1984-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61113725U true JPS61113725U (da) | 1986-07-18 |
Family
ID=30764173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20192984U Pending JPS61113725U (da) | 1984-12-26 | 1984-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61113725U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006096498A (ja) * | 2004-09-29 | 2006-04-13 | Shimadzu Corp | 基板搬送装置およびこれを備える真空処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5647822B2 (da) * | 1977-08-10 | 1981-11-12 |
-
1984
- 1984-12-26 JP JP20192984U patent/JPS61113725U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5647822B2 (da) * | 1977-08-10 | 1981-11-12 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006096498A (ja) * | 2004-09-29 | 2006-04-13 | Shimadzu Corp | 基板搬送装置およびこれを備える真空処理装置 |
| JP4581602B2 (ja) * | 2004-09-29 | 2010-11-17 | 株式会社島津製作所 | 真空処理装置 |