JPS61112860U - - Google Patents
Info
- Publication number
- JPS61112860U JPS61112860U JP20053784U JP20053784U JPS61112860U JP S61112860 U JPS61112860 U JP S61112860U JP 20053784 U JP20053784 U JP 20053784U JP 20053784 U JP20053784 U JP 20053784U JP S61112860 U JPS61112860 U JP S61112860U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- holes
- concentric circle
- polishing pad
- polishing surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 14
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20053784U JPS61112860U (fr) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20053784U JPS61112860U (fr) | 1984-12-27 | 1984-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61112860U true JPS61112860U (fr) | 1986-07-17 |
Family
ID=30761479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20053784U Pending JPS61112860U (fr) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61112860U (fr) |
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1984
- 1984-12-27 JP JP20053784U patent/JPS61112860U/ja active Pending