JPS61112860U - - Google Patents
Info
- Publication number
- JPS61112860U JPS61112860U JP20053784U JP20053784U JPS61112860U JP S61112860 U JPS61112860 U JP S61112860U JP 20053784 U JP20053784 U JP 20053784U JP 20053784 U JP20053784 U JP 20053784U JP S61112860 U JPS61112860 U JP S61112860U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- holes
- concentric circle
- polishing pad
- polishing surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 14
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Description
図面は本考案の実施例を示し、第１図は研磨パ
ツトの研磨面の一部表わした平面図、第２図は第
１図の―線拡大断面図、第３図は研磨装置の
使用状態を表わした正面図である。
１……研磨用グラインダ、５……駆動ホルダ、
７……研磨パツト、７ａ……研磨パツトの研磨面
、７ｂ……研磨パツトの回転軸芯、８……孔。
The drawings show an embodiment of the present invention, in which Fig. 1 is a plan view showing a part of the polishing surface of the polishing pad, Fig. 2 is an enlarged cross-sectional view taken along the line -- in Fig. 1, and Fig. 3 is a usage state of the polishing device. FIG. 1... Polishing grinder, 5... Drive holder,
7... Polishing pad, 7a... Polishing surface of polishing pad, 7b... Rotation axis of polishing pad, 8... Hole.
Claims (1)
可能に装着した研磨パツトの研磨面に、その回転
軸芯を中心とする二つ以上の同心円上に沿つてそ
れぞれ複数個の孔を形成し、しかもこれらの隣接
する一方の同心円上の孔と他方の同心円上の孔と
が前記研磨面の半径方向に関する同一線上に位置
しないように配置したことを特徴とする研磨装置
。 A plurality of holes are formed in the polishing surface of a polishing pad removably attached to a drive holder of a polishing grinder along two or more concentric circles centered on the rotation axis of the polishing pad, and these holes are A polishing device characterized in that adjacent holes on one concentric circle and holes on the other concentric circle are arranged so that they are not located on the same line in the radial direction of the polishing surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20053784U JPS61112860U (en) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20053784U JPS61112860U (en) | 1984-12-27 | 1984-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61112860U true JPS61112860U (en) | 1986-07-17 |
Family
ID=30761479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20053784U Pending JPS61112860U (en) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61112860U (en) |
-
1984
- 1984-12-27 JP JP20053784U patent/JPS61112860U/ja active Pending
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