JPS61112640U - - Google Patents
Info
- Publication number
- JPS61112640U JPS61112640U JP19953684U JP19953684U JPS61112640U JP S61112640 U JPS61112640 U JP S61112640U JP 19953684 U JP19953684 U JP 19953684U JP 19953684 U JP19953684 U JP 19953684U JP S61112640 U JPS61112640 U JP S61112640U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- claw
- transfer device
- light emitting
- claws
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19953684U JPS61112640U ( ) | 1984-12-26 | 1984-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19953684U JPS61112640U ( ) | 1984-12-26 | 1984-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61112640U true JPS61112640U ( ) | 1986-07-16 |
Family
ID=30759550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19953684U Pending JPS61112640U ( ) | 1984-12-26 | 1984-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61112640U ( ) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0425151A (ja) * | 1990-05-21 | 1992-01-28 | Canon Inc | 薄板検出装置 |
-
1984
- 1984-12-26 JP JP19953684U patent/JPS61112640U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0425151A (ja) * | 1990-05-21 | 1992-01-28 | Canon Inc | 薄板検出装置 |