JPS61112224U - - Google Patents
Info
- Publication number
- JPS61112224U JPS61112224U JP1984199529U JP19952984U JPS61112224U JP S61112224 U JPS61112224 U JP S61112224U JP 1984199529 U JP1984199529 U JP 1984199529U JP 19952984 U JP19952984 U JP 19952984U JP S61112224 U JPS61112224 U JP S61112224U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- karman
- vortex flowmeter
- karman vortex
- displacements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984199529U JPS61112224U (enExample) | 1984-12-26 | 1984-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984199529U JPS61112224U (enExample) | 1984-12-26 | 1984-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61112224U true JPS61112224U (enExample) | 1986-07-16 |
Family
ID=30759537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984199529U Pending JPS61112224U (enExample) | 1984-12-26 | 1984-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61112224U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5029555A (en) * | 1988-03-10 | 1991-07-09 | International Business Machines Corporation | Wafer holder method and apparatus in a vacuum deposition system |
-
1984
- 1984-12-26 JP JP1984199529U patent/JPS61112224U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5029555A (en) * | 1988-03-10 | 1991-07-09 | International Business Machines Corporation | Wafer holder method and apparatus in a vacuum deposition system |