JPS61109136U - - Google Patents
Info
- Publication number
- JPS61109136U JPS61109136U JP1984194612U JP19461284U JPS61109136U JP S61109136 U JPS61109136 U JP S61109136U JP 1984194612 U JP1984194612 U JP 1984194612U JP 19461284 U JP19461284 U JP 19461284U JP S61109136 U JPS61109136 U JP S61109136U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- outlet
- tank
- cleaned
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
Description
図は本考案の一実施例を示す断面図である。
１２……洗浄槽、１４……排出孔、１６……排
出弁、２２……回転体、２４……回転軸、２６…
…回転駆動装置、２８……整列治具、３０……被
洗浄物、３２……ノズル体、３４……蓋、３６…
…超音波発生装置。
The figure is a sectional view showing an embodiment of the present invention. 12...Cleaning tank, 14...Drain hole, 16...Drain valve, 22...Rotating body, 24...Rotating shaft, 26...
...Rotation drive device, 28...Alignment jig, 30...Object to be cleaned, 32...Nozzle body, 34...Lid, 36...
...Ultrasonic generator.
Claims (1)
た洗浄槽と、該洗浄槽内に水平に回転自在に設置
される回転体と、該回転体の周辺部に固定設置さ
れて被洗浄物を保持する治具と、該治具に保持さ
れた被洗浄物に洗浄液または水を噴射するノズル
体と、槽内の洗浄液または水に対し超音波振動を
付与する超音波発生装置とを設けたことを特徴と
する。 A cleaning tank equipped with an inlet and an outlet for objects to be cleaned and an outlet for cleaning liquid, etc.; a rotating body installed horizontally in the cleaning tank so as to be freely rotatable; A nozzle body that injects cleaning liquid or water onto the object to be cleaned held in the jig, and an ultrasonic generator that applies ultrasonic vibration to the cleaning liquid or water in the tank. It is characterized by
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984194612U JPS61109136U (en) | 1984-12-22 | 1984-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984194612U JPS61109136U (en) | 1984-12-22 | 1984-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61109136U true JPS61109136U (en) | 1986-07-10 |
Family
ID=30752065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984194612U Pending JPS61109136U (en) | 1984-12-22 | 1984-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61109136U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014534610A (en) * | 2011-09-22 | 2014-12-18 | エーシーエム リサーチ （シャンハイ） インコーポレーテッド | Flip chip assembly cleaning method and apparatus |
-
1984
- 1984-12-22 JP JP1984194612U patent/JPS61109136U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014534610A (en) * | 2011-09-22 | 2014-12-18 | エーシーエム リサーチ （シャンハイ） インコーポレーテッド | Flip chip assembly cleaning method and apparatus |
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