JPS61105886A - Processing head unit in laser processing device - Google Patents

Abstract

PURPOSE:To prevent bad effect from being exerted on the other optical systems such as the mirror assembling body even when the clamping unit and so forth collide against the processing head unit by a method wherein deformation facilitating parts are formed at parts of the intermediary cylinder members provided interposingly between the vertically moving cylinder members and the condensing lens units. CONSTITUTION:The vertically moving cylinder members 35 of a processing head unit 13 and condensing lens units 37 are coupled together through intermediary cylinder members 39 and nozzle units 10 are detachably installed under the lower parts of the condensing lens units 37. Deformation facilitating parts 39T, which are easy to generate a deformation easily by an external force, are formed at proper positions on the intermediary cylinder members 39. Each intermediary cylinder member 39 can be constituted of an elastic member its own body too by forming a part thereof in a thin-wall form, for example, or by making such an elastic body as a rubber body interpose in the interior of the intermediary cylinder member 39. by this way, when an external force acts on the condensing lens units 37 and so forth, the deformation facilitating parts 39T deform and the external force is prevented from being transferred to the vertically moving cylinder members 35 and so forth. As a result, adverse effect to effect the other optical systems such as a mirror assembling body 15 can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a laser processing device, and more particularly to a processing head device in a laser processing device.

(b) Prior art In a laser processing device that mainly performs laser processing on a flat workpiece, a processing head is installed in a fixed position, and the workpiece is aligned with respect to the processing head along the X axis and yi.
There are types in which the machining head is moved in the Plh direction and types in which the machining head moves secondarily or three-dimensionally with respect to a workpiece fixed at a fixed position. In a laser processing device in which a workpiece is moved, the edge of the workpiece is clamped by a work clamp device installed in the workpiece moving device. The equipment may collide with the processing head. In addition, in the type a3 in which the machining head moves, the machining head may collide with the fixture that is intended to fix the workpiece.

Therefore, conventionally, a structure has been adopted in which a proximity detection device is provided to detect the proximity of a work clamp device or the like to the processing head, or a rich sensor or the like is provided in the processing head. When the proximity detection device detects that the work clamp device, etc. approaches the processing head, or when the work clamp device, etc. comes into contact with the touch sensor, the relative movement between the processing head and the workpiece is detected. Configured to stop.

(C) Problems to be Solved by the Invention In the conventional laser processing equipment as described above, if the proximity detection device, touch sensor, etc. do not function sufficiently, the relative movement speed between the processing head and the workpiece If the workpiece clamping device, etc. comes into contact with the machining head with a large impact without sufficient braking action, the machining head may be damaged or other important optical systems may be adversely affected. I have something to give.

The present invention was invented in view of the above-mentioned conventional problems, and even if a clamping device or the like collides with the processing head, it will not adversely affect other important optical systems. The aim is to provide a laser processing device that is

(d) Means for solving the problem In order to solve the conventional problem as described above, the present invention provides the following:
A deformable part that is easily deformed by external force is formed in a part of an intermediary member interposed between an elevating cylinder member and a condensing lens unit in a laser processing apparatus.

(e) By forming an easily deformable part that is easily deformed by external force in one part of the action mediating member, the easily deformable part of the mediating member will not deform when a clamping device etc. collides with the processing head. This will absorb the impact. Therefore, the impact or the like is not transmitted to other important optical systems beyond the easily deformable portion of the intermediary member, and the important optical systems can be protected.

(f) Embodiment Referring to FIG. 1, a laser processing device generally indicated by the symbol @1 is suitably connected to a suitable laser oscillator 3, such as a carbon dioxide laser oscillator. The laser oscillator 3 is a general type and is configured to irradiate a laser beam LB in the direction of the laser processing apparatus 1.

The laser processing apparatus 1 includes a base 5, a post 7 provided vertically at one end of the base 5, and an overhead beam 9 supported horizontally above the base 5 and in a cantilever manner on the post 7. It is made up of. A work table 11 is provided on the top of the base 5 to support a plate-shaped workpiece W placed horizontally to be processed. A machining head device 13 is installed at the tip of the overlapping Radbeam 9.
is provided. This processing head device 13, mirror assembly 15, condensing lens 17, and nozzle unit 19
It is equipped with The mirror assembly 15 converts the laser beam L\LB irradiated from the laser oscillator 3 into a condenser lens 1.
7 and the nozzle unit 19 in the direction of the workpiece W.
Reference numeral 9 is configured to inject an appropriate assist gas to the workpiece W at the same time as the workpiece W is irradiated with the laser beam LB.

In order to move and position the workpiece W to be machined, the laser processing apparatus 1 includes a first carriage 21 and a second carriage 23 that are horizontally movable. The second carriage 23 is slidably supported on the first carriage 21 and includes a plurality of work clamp devices 25 for gripping the workpieces W. The first key ↑/ridge 21 is slidably supported on a pair of rails 27 fixed in parallel to each other on the upper part of the base 5, and is close to the processing area directly below the processing head device 13. Free to leave. More specifically, the first carriage 21 is
In this embodiment, in order to move the second carriage 23 and the workpiece clamping device 25 in the direction toward and away from the processing area, a drive mechanism consisting of a servo motor 29, a lead screw 31, and a nut member 33 is used to clamp the workpiece. It is configured to move horizontally along the top surface of the table 11. Further, a second carriage 23 equipped with a work clamp device 25 is supported by the first carriage 21, and is configured to move horizontally in a direction orthogonal to the rail 27 by a servo motor (not shown). ing. Therefore, the workpiece W gripped by the workpiece clamp device 25 is placed in the first position. By moving the second key 17 rig 21.23, the work table 11
The processing head device 13 can be moved to a position below the processing head device 13. The workpiece W positioned below the processing head device 13 is appropriately processed by a laser beam LB oscillated by the laser oscillator 3 and irradiated via the processing head device 13.

Referring to FIG. 2, the processing head device 13 includes an elevating tube member 35, a condensing lens unit 37 including the condensing lens 17, the nozzle unit 19, and the like. The elevating tube section vJ35 and the condensing lens unit 37 are connected through three intermediate tube members, and the nozzle unit 19 is detachably attached to the lower part of the condensing lens unit 37.

The elevating tube member 35 is suitably connected to the lower end of a vertically adjustable moon 41 provided below the mirror assembly 15 so as to be vertically movable. Detailed illustration is omitted (however, the vertical adjustment cylinder member 41 is configured to move up and down by the drive of a vertical adjustment servo motor (not shown), and this vertical adjustment cylinder member 7! 11 is moved up and down, the elevating cylinder member 35 is moved up and down integrally.

In order to connect the intermediate cylinder member 39, a screw portion 35S is formed on the outer periphery of the lower end of the elevating cylinder member 35, and a positioning pin 43 is fixed to the lower end surface. A flange portion 39F having a positioning hole 45 into which the positioning pin 43 fits is formed at the upper end of the intermediate cylinder member 39. An annular cap nut member 4 screwed into the screw portion 35S
7 presses the flange portion 39F against the lower end surface of the elevating cylinder member 35, whereby the intermediary cylinder member 39 is removably connected to the elevating cylinder member 35.

An annular flange member 51 is removably fixed to the F end of the intermediate cylindrical member 39 by a plurality of fixing devices 49 such as bolts, and the flange member 51 is attached to the condensing lens unit 37 by a plurality of fixing devices 53. connected. Easily deformable portions 39T, which are easily deformed by external forces, are formed at appropriate positions on the intermediate cylindrical member 39. In this embodiment, a part of the intermediary cylindrical member 39 is formed to have a thin wall as the easily deformable portion 39T, but the structure is not limited to this embodiment. It is also possible to configure the intermediate cylindrical member 39 itself from an elastic body.

With the above configuration, when an external force acts on the condenser lens unit 37 etc., the easily deformable portion 39T of the intermediary cylinder member 39 deforms and prevents the external force from being transmitted to the elevating cylinder member 35 etc., for example. Adverse effects on the optical system such as the mirror assembly 15 are prevented. In other words, the optical system such as the mirror assembly 15 is protected from external forces.

The condensing lens unit 37 includes the condensing lens 17 that is vertically adjustable and detachable and replaceable. More specifically, the lens holding tube 55 holding the condensing lens 17 is removably screwed onto the lower end of the adjustment tube member 57. The adjustment cylinder member 57 is supported in the center of the cylindrical housing 59 so as to be able to move up and down, and has a screw portion 57s on the outer periphery of the upper part.
is formed. In order to adjust the adjustment cylindrical portion 57 by 1-down, an annular nut member 61 having a plurality of tool holes 61H on the outer peripheral surface is screwed into the threaded portion 57S of the adjustment cylindrical member 57. The nut member 61 is rotatably supported by an annular bearing boulder 65 via a bearing 63, and the bearing boulder 65 is fixed to the housing 59 by a plurality of fixtures 67 and It is connected to the flange member 51.

With the above configuration, the condenser lens 17 can be attached to and detached from the adjustment tube member 57 by removing the lens holding tube 55 from the adjustment tube member 57. Therefore, it is possible to use optimal condensing lenses 17 with different focal lengths depending on the thickness of the workpiece W, and processing accuracy can be further improved. Furthermore, by engaging an appropriate tool in the tool hole 611 of the nut member 61 and rotating the nut member 61, the vertical position of the adjustment cylinder member 57 can be adjusted.

Therefore, the focal position of the condenser lens 17 can be appropriately aligned with the upper surface of the workpiece W, etc.

In order to cool the condenser lens 17 via the adjustment cylinder member 57, an adjustment cylinder member 57 is provided in the center of the housing 59.
An annular cooling water chamber 69 is formed surrounding the cooling water chamber 69, and a cooling water supply/discharge hole 71 is connected to this cooling water chamber 69. Therefore, the condenser lens 17 is cooled by the cooling water.

As will be described later, in order to detachably attach the nozzle unit 19 to the condenser lens unit 37, an engagement recess 73 is formed in the lower part of the housing 59 that extends into the condenser lens unit L37. Also housing 57
An annular flange portion 75 that protrudes inward is formed at the lower end of the flange portion 75, and cutout portions 75N are formed at appropriate intervals in the flange portion 75. The housing 57 also has an assist gas supply hole 77 that communicates with the engagement recess 73.
is drilled.

The nozzle holder [-19 is an annular connecting portion') that functions to inject assist gas to the workpiece W, and is removably engageable with the engagement recesses 73 of the five housings. A
I have seven things in place. On the outer circumferential surface of the connecting portion 79, engaging IV portions 791-1 are formed at the same intervals as the notches 75N, which can freely pass through the notches 75N formed in the flange portion 75. Therefore, the notch 75 of the flange portion 75
After N is engaged with the locking portion 79H of the connecting portion 79 and passed through, J2 is appropriately rotated around the connecting member 79, and the locking portion 791-1 is locked with the flange portion 75. ,
The connecting member 7 is engaged and held in the engagement recess 73 of the housing 59. As already understood, the connecting member 79 saves IB for 5 housings! It can be set up freely.

A cylindrical nozzle holder 83 having a nozzle 81 at its lower end is installed at the bottom of the connecting portion +A79 so as to be adjustable in the horizontal direction. ? That is, a four part 79C is formed on the lower surface of the connecting part +279, and a flange part 83F formed on the upper part of the nozzle holder 83 is arranged in this recessed part 79C, and the holder fixed to the lower surface of the connecting member 79 It is held in ring 85 with J:. Four portions 83C of appropriate size are formed at appropriate intervals at multiple locations on the outer circumferential surface of the flange portion 83F of the nozzle holder 83, and the recess portions 83C include a plurality of portions screwed horizontally to the lower part of the connecting portion 79. The tip of the adjustment bolt 87 is in abutting engagement. Therefore, by adjusting each adjustment bolt 87, the nozzle holder 83 is adjusted horizontally, and the axis of the nozzle 81 is aligned with the axis of the laser beam IB.

A cylindrical cask holder 91 is held on the outer periphery of the nozzle holder 83 via a stroke bearing 89 so as to be vertically movable. A coil spring 93 is loaded between the cask holder 91 and the nozzle holder 83, and the caster boulder 91 is always urged downward. A plurality of balls 95 are rotatably mounted on the lower end of the caster holder 91 and can be moved around the upper surface of the workpiece W. The above-mentioned pole 95 is arranged so as to avoid the side surface of the cask holder 91 facing the workpiece clamping device 25, and the side surface of the cask holder 91 facing the workpiece clamping device 25 is made as thin as possible to reduce dead zones. There is a notch in the

In order to prevent the cask holder 91 from coming off downward, a plurality of cutout grooves 910 are formed on the outer peripheral surface of the cask holder 91. One-digit locking piece 97 on the bottom surface
The claws are engaged. In addition, a proximity sensor 101 is attached to the holder ring 85 via a bracket 1-99 to detect the tenth movement of the caster holder 91, and a detected member 103 is attached to the caster holder 91. ing. The proximity sensor 101 is connected to the detected member 10.
The above-mentioned vertical adjustment servo motor is controlled according to the output of the proximity sensor 101, and the detected member 103 and the proximity sensor 10 are
1 is constructed so that the gap between the two is always kept constant.

In the above configuration, the workpiece W is gripped by the workpiece clamp device 25, moved and positioned, and the workpiece W is subjected to laser processing. If the workpiece W has a warp or undulation, the caster holder 91 moves up and down in accordance with the warp or undulation. The vertical movement of the caster holder 91 is detected by the detected member 103 and the proximity sensor 101, and this detection controls the vertical adjustment servo motor to control the vertical adjustment cylinder member/1.
1 is adjusted down to -L. According to the vertical movement of the second lower adjustment cylinder member 41, the condenser lens unit 37 etc. are also adjusted vertically, and the gap between the detected member 103 and the proximity spring 101 is always controlled to be constant. The focal position of the condensing lens 17 with respect to the piece W is always kept constant, and the processing accuracy is kept constant without fluctuation.

When moving and positioning the workpiece W to perform processing as described above, if the workpiece clamp device 25'8- comes into contact with the nozzle unit 19 etc., as described above, the intermediate cylinder member 39 may be deformed. Since the easy part 39T deforms and absorbs shock etc., it is impossible to cause a large adverse effect on other important parts. nailJ, intermediate cylinder member 3
When 9 becomes deformed, you can easily respond to Meigetsu (by exchanging 1).

(0) Effects of the invention Nozzle in processing head device: 7- When an external force acts on the knit or condensing lens unit, the easily deformable portion of the intermediary cylinder member deforms easily and absorbs the impact, etc. It is possible to prevent major adverse effects on the important parts of the body and protect the important parts.

It should be noted that the present invention is not limited to the embodiments shown in the previous example.By making appropriate changes, the present invention can also be implemented in the form shown in the figure.

[Brief explanation of the drawing]

FIG. 1 is a front view of the laser processing apparatus, and FIG. 2 is an enlarged W cross-sectional view of the main parts. 35...t71 (?Cylinder part'+A-37...Three condensing lens units...Intermediary cylinder part+J 39T...Transformation Easily Department Agent Patent Attorney Yasu Miyoshi Otoko Procedurener 11 Official Book) Spontaneous) 1981/] July 72, Manabu Shiga, Commissioner of the Patent Office, 1, Indication of the case, Showa 4Z, Relationship with Patent Application No. Stomach tip Φ stone day 200+
2 also full name〈name〈name)
Person: Dai EB Shima 8ha4, Agent address: 1-2-3 Toranomon, Minato-ku, Tokyo 105
Toranomon No. 5 Building 5th Floor G Netsume Tadashi's τL Kame (1) drawing. Purifier / 7 Ne Fusho. The inside is SjiA, what kind of harm is it?

Claims (3)

[Claims] (1) An intermediary cylinder member is detachably interposed between the elevating cylinder member and the condensing lens unit in a laser processing device, and a part of this intermediary cylinder member is easily deformed by external force. 1. A processing head device for a laser processing device, characterized by forming an easily deformable portion. (2) The processing head device according to claim 1, wherein the easily deformable portion of the intermediate cylindrical member is formed to have a thin wall. (3) The processing head device according to claim 1, wherein the easily deformable portion of the intermediate cylindrical member is made of an elastic body.