JPH0464479B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a laser processing device, and more particularly to a processing head device in a laser processing device.

(b) Prior art Laser processing equipment that primarily performs laser processing on flat workpieces has a processing head installed in a fixed position, and the workpiece moves in the X-axis and Y-axis directions with respect to this processing head. In some types, the machining head moves in two or three dimensions with respect to the workpiece which is fixed in a fixed position. In a type of laser processing apparatus in which a workpiece is moved, the edge of the workpiece is clamped by a workpiece clamping device provided in a workpiece moving and positioning device, and when the workpiece is moved, the workpiece clamping device may collide with the machining head. Furthermore, in the case of a type in which the processing head moves, the processing head may collide with a fixture for fixing the workpiece.

Therefore, conventionally, a structure has been adopted in which a proximity detection device is provided to detect the proximity of a work clamp device or the like to the processing head, or a touch sensor or the like is provided in the processing head. When the proximity detection device detects that the work clamp device etc. is close to the processing head,
Alternatively, when a workpiece clamping device or the like comes into contact with the touch sensor, the relative movement between the processing head and the workpiece is stopped.

(c) Problems to be solved by the invention In the conventional laser processing equipment as described above, there are cases where the proximity detection device, touch sensor, etc. do not function sufficiently, or when the relative movement speed between the processing head and the workpiece is high. If the workpiece clamping device, etc. comes into contact with the machining head with an impact without sufficient braking action, the machining head may be damaged or other important optical systems may be adversely affected. There is.

The present invention was devised in view of the above-mentioned problems in the prior art, and even if a clamping device or the like collides with the processing head, it does not adversely affect other important optical systems. The aim is to provide equipment.

(d) Means for Solving the Problems In order to solve the conventional problems as described above, the present invention generally provides an intermediary interposed between an elevating tube member and a condensing lens unit in a laser processing device. A part of the member is formed with an easily deformable part that is easily deformed by external force.

(e) Effect By forming an easily deformable part that is easily deformed by external force in one part of the intermediary member, the easily deformable part of the intermediary member is deformed when a clamping device or the like collides with the processing head. This will absorb the impact. Therefore, impact or the like is not transmitted to other important optical systems beyond the easily deformable portion of the intermediary member, and the important optical systems can be protected.

(f) Embodiment Referring to FIG. 1, a laser processing apparatus, generally designated by the reference numeral 1, is suitably connected to a suitable laser oscillator 3, such as a carbon dioxide laser oscillator. The laser oscillator 3 is a general type and is configured to irradiate a laser beam LB in the direction of the laser processing apparatus 1.

The laser processing device 1 includes a base 5, a post 7 provided perpendicularly to one end of the base 5, and a base 5.
It is constituted by an overhead beam 9 supported horizontally above the post 7 in a cantilevered manner. A work table 11 is provided on the top of the base 5 to support a plate-shaped workpiece W placed horizontally to be processed. A processing head device 13 is provided at the tip of the overhead beam 9. As shown in FIG. This processing head device 13 includes a mirror assembly 15, a condenser lens 17, and a nozzle unit 19. The above mirror assembly 15
is the laser beam irradiated from the laser oscillator 3
LB to condenser lens 17 and nozzle unit 19
The nozzle unit 19 is configured to eject appropriate assist gas to the workpiece W at the same time as the laser beam LB is irradiated onto the workpiece W.

In order to move and position the workpiece W to be processed, the laser processing device 1 includes a first carriage 21 and a second carriage 23 that are horizontally movable.
It is equipped with The second carriage 23 is slidably supported on the first carriage 21 and includes a plurality of work clamp devices 25 for gripping the workpiece W. The first carriage 21 is slidably supported on a pair of rails 27 fixed in parallel to each other on the upper part of the base 5, and can freely approach and leave the machining area directly below the machining head device 13. be. More specifically, the first
In this embodiment, the carriage 21 is equipped with a drive mechanism comprising a servo motor 29, a lead screw 31, and a nut member 33 in order to move the second carriage 23 and the work clamp device 25 in the direction toward and away from the processing area. It is configured to move horizontally along the upper surface of the work table 11. Further, a second carriage 23 equipped with a work clamp device 25 is supported by the first carriage 21, and is configured to move horizontally in a direction orthogonal to the rail 27 by a servo motor (not shown). . Therefore, the workpiece W gripped by the workpiece clamp device 25 is moved between the first and second carriages 21 and 23.
can be moved to a position below the machining head device 13 on the work table 11. The workpiece W positioned below the processing head device 13 is appropriately processed by the laser beam LB oscillated by the laser oscillator 3 and irradiated via the processing head device 13.

Referring to FIG. 2, the processing head device 13
is composed of an elevating tube member 35, a condensing lens unit 37 including the condensing lens 17, the nozzle unit 19, and the like. The elevating tube member 35 and the condensing lens unit 37 are connected via an intermediary tube member 39, and the nozzle unit 19 is detachably attached to the lower part of the condensing lens unit 37.

The elevating cylinder member 35 is connected to the mirror assembly 15.
It is suitably connected to the lower end of a vertically adjustable cylinder member 41 provided on the lower side so as to be vertically movable. Although detailed illustration is omitted, the vertical adjustment cylinder member 41 is
It is configured to move up and down by driving a vertical adjustment servo motor (not shown), and when this vertical adjustment cylinder member 41 is moved up and down,
The elevating cylinder member 35 is moved up and down integrally.

In order to connect the intermediate cylindrical member 39,
A screw portion 35S is formed on the outer periphery of the lower end of the elevating tube member 35, and a positioning pin 43 is fixed to the lower end surface. At the upper end of the intermediate cylindrical member 39,
A flange portion 39F is formed that includes a positioning hole 45 into which the positioning pin 43 fits. By pressing the flange portion 39F against the lower end surface of the elevating cylinder member 35 using the annular cap nut member 47 screwed into the threaded portion 35S, the intermediary cylinder member 39 is removably connected to the elevating cylinder member 35. ing.

An annular flange member 51 is attached to the lower end of the intermediate cylindrical member 39 by a plurality of fixing devices 49 such as bolts.
is removably fixed thereto, and the flange member 51 is connected to the condenser lens unit 37 by a plurality of fixtures 53. Easily deformable portions 39T, which are easily deformed by external forces, are formed at appropriate positions on the intermediate cylindrical member 39. In this embodiment, a part of the intermediary cylindrical member 39 is formed to have a thin wall as the easily deformable portion 39T. , intermediate cylinder member 39
It is also possible to configure itself from an elastic body.

With the above configuration, when an external force acts on the condenser lens unit 37 etc., the easily deformable portion 39T of the intermediary cylinder member 39 deforms, and the external force is applied to the elevating cylinder member 35.
For example, an adverse effect on the optical system such as the mirror assembly 15 is prevented. In other words, the optical system such as the mirror assembly 15 is protected from external forces.

The condensing lens unit 37 includes the condensing lens 17 which can be adjusted up and down and can be detached and replaced. More specifically, the lens holding tube 55 holding the condensing lens 17 is detachably screwed onto the lower end of the adjustment tube member 57. The adjustment cylinder member 57 is supported in a central part of a cylindrical housing 59 so as to be able to move up and down, and a threaded part 57S is formed on the outer peripheral part of the upper part. In order to vertically adjust the adjustment cylinder member 57, an annular nut member 61 having a plurality of tool holes 61H on the outer peripheral surface is screwed into the threaded portion 57S of the adjustment cylinder member 57. The nut member 61 is a bearing 63
The bearing holder 65 is fixed to the housing 59 by a plurality of fixtures 67, and is connected to the flange member 5 via the fixtures 53.
1.

With the above configuration, by attaching and detaching the lens holding tube 55 to and from the adjustment tube member 57, the condenser lens 17 can be attached and detached. Therefore,
Optimal condensing lenses 17 with different focal lengths can be used depending on the thickness of the workpiece W,
Machining accuracy can be further improved. Further, by engaging an appropriate tool in the tool hole 61H of the nut member 61 and rotating the nut member 61, the vertical position of the adjusting cylinder member 57 can be adjusted.
Therefore, the focal position of the condenser lens 17 can be appropriately aligned with the upper surface of the workpiece W, etc.

In order to cool the condensing lens 17 via the adjustment cylinder member 57, a central portion of the housing 59 is provided with a
An annular cooling water chamber 69 is formed surrounding the adjustment cylinder member 57, and a cooling water supply/discharge hole 71 is connected to this cooling water chamber 69. Therefore, the condenser lens 17 is cooled by the cooling water.

As will be described later, in order to detachably attach the nozzle unit 19 to the condenser lens unit 37, an engagement recess 73 is formed in the lower part of the housing 59 of the condenser lens unit 37. Further, an annular flange portion 75 protruding inward is formed at the lower end of the housing 57, and the flange portion 75 is provided with notches 7 at appropriate intervals.
5N is formed. Further, an assist gas supply hole 77 is formed in the housing 57 and communicates with the engagement recess 73 .

The nozzle unit 19 functions to inject assist gas to the workpiece W, and is provided with an annular connecting member 79 that can be freely engaged with and detached from the engagement recess 73 of the housing 59. This connecting member 79
On the outer circumferential surface of the flange portion 75, locking portions 79H that can freely pass through the notch portions 75N formed in the flange portion 75 are formed at the same intervals as the notch portions 75N. Therefore, the connecting member 7 is inserted into the notch 75N of the flange portion 75.
By engaging the locking portion 79H of No. 9 and passing the connecting member 79, the locking portion 79
H is locked to the flange portion 75, and the connecting member 79 is engaged and held in the engagement recess 73 of the housing 59. As already understood, the connecting member 79 is detachably attached to the housing 59.

A cylindrical nozzle holder 83 having a nozzle 81 at its lower end is attached to the lower part of the connecting member 79 so as to be adjustable in the horizontal direction. That is, a recess 79C is formed in the lower surface of the connecting member 79, a flange 83F formed on the upper part of the nozzle holder 83 is disposed in the recess 79C, and a holder ring 85 fixed to the lower surface of the connecting member 79 is disposed. is held by. Recesses 83C of an appropriate size are formed at appropriate intervals at multiple locations on the outer peripheral surface of the flange portion 83F of the nozzle holder 83.
The tips of a plurality of adjustment bolts 87 screwed horizontally into the lower part of the connecting member 79 are abutted and engaged with C. Therefore, by adjusting each adjusting bolt 87, the nozzle holder 83 is adjusted horizontally, and the axis of the nozzle 81 is aligned with the laser beam LB.
coincides with the axis of

A cylindrical caster holder 91 is held on the outer periphery of the nozzle holder 83 via a stroke bearing 89 so as to be vertically movable. A coil spring 93 is elastically mounted between the caster holder 91 and the nozzle holder 83, and the caster holder 91 is always urged downward. At the lower end of this caster holder 91, there is a workpiece W.
A plurality of balls 95 are rotatably mounted on the upper surface of the holder. The ball 95 is arranged so as to avoid the side surface of the caster holder 91 facing the workpiece clamping device 25, and the side surface of the caster holder 91 facing the workpiece clamping device 25 is cut out to be as thin as possible in order to reduce the dead zone. .

In order to prevent the caster holder 91 from coming off downward, cutout grooves 91G are formed at a plurality of locations on the outer peripheral surface of the caster holder 91. The claw portion of the locking piece 97 is engaged. Further, in order to detect vertical movement of the caster holder 91, a proximity sensor 101 is attached to the holder ring 85 via a bracket 99, and a detected member 103 is attached to the caster holder 91. The proximity sensor 101 is a member to be detected 10
The above-mentioned vertical adjustment servo motor is controlled according to the output of this proximity sensor 101, and the gap between the detected member 103 and the proximity sensor 101 is always maintained constant. It is configured to

In the above configuration, the workpiece W is gripped by the workpiece clamp device 25, moved and positioned, and the workpiece W is laser-processed. If the workpiece W has a warp or undulation, the caster holder 91 moves up and down in accordance with the warp or undulation. This vertical movement of the caster holder 91 is detected by the detected member 103 and the proximity sensor 101, and this detection controls the vertical adjustment servo motor to vertically adjust the vertical adjustment cylinder member 41. As the vertical adjustment cylinder member 41 moves up and down, the condenser lens unit 37 and the like are also adjusted up and down, so that the gap between the detected member 103 and the proximity sensor 101 is always controlled to be constant. Therefore, the condenser lens 17 for the workpiece W
The focal point position is always kept constant, and the machining accuracy is kept constant without fluctuation.

When the workpiece W is moved and positioned to be processed as described above, if the workpiece clamping device 25 or the like comes into contact with the nozzle unit 19 or the like, the easily deformable portion 39T of the intermediary cylinder member 39 is deformed as described above. Since it absorbs shock, etc., it does not have a major adverse effect on other important parts. Incidentally, if the intermediary cylinder member 39 is deformed, it can be easily dealt with by attaching and detaching it and replacing it.

(g) Effects of the Invention As can be understood from the description of the embodiments above, the present invention is based on the invention, in that the lower end of the elevating cylinder member 35 provided in the processing head device 13 of the laser processing device 1 so as to be movable up and down. The upper end of the intermediary cylinder member 39 is detachably connected and provided, and the condensing lens unit 37 including the condensing lens 17 is removably connected and provided to the lower end of the intermediary cylinder member 39. An easily deformable portion that absorbs the impact when the condenser lens unit 37 comes into contact with the work clamp device 25 etc. in the laser processing device 1 and prevents this impact from being transmitted to the elevating cylinder member 35 side. 39T is provided in a part of the intermediate cylindrical member 39.

As is clear from the above configuration, in the present invention, an intermediate cylinder member 39 is detachably connected to the lower end of the elevating cylinder member 35 in the processing head device 13 of the laser processing apparatus 1, and this intermediate cylinder member 3
A condensing lens unit 37 is detachably connected to the lower end of the lens 9.

A portion of the intermediary cylinder member 39 absorbs the impact when the work clamp device 25 or the like in the laser processing apparatus 1 comes into contact with the condenser lens unit 37, etc., and this impact is absorbed by the elevating cylinder member. 3
An easily deformable portion 39T is provided to prevent transmission to the 5 side.

Therefore, according to the present invention, even if the work clamp device 25 and the condensing lens unit 37 collide, the impact is not transmitted to the elevating tube member 35 side, and the elevating tube member 35 The side optical system can be protected from the impact of the collision. Further, in the event that the intermediate cylinder member 39 is damaged, it can be replaced with a new intermediate cylinder member 39, and the problem can be easily dealt with.

Note that the present invention is not limited to the above-described embodiments, but can be implemented in other embodiments by making appropriate changes.

[Brief explanation of the drawing]

FIG. 1 is a front view of the laser processing apparatus, and FIG. 2 is an enlarged front sectional view of the main parts. 35... Lifting tube member, 37... Condensing lens unit, 39... Intermediate tube member, 39T... Easily deformable part.

Claims (1)

[Claims] 1. Processing head device 1 in laser processing device 1
The upper end of an intermediary cylindrical member 39 is detachably connected to the lower end of an elevating cylinder member 35 which is provided to be movable up and down in the lower end of the intermediate cylindrical member 35.
A condensing lens unit 37 comprising a condensing lens 17 is detachably connected and provided to absorb shock when the condensing lens unit 37 comes into contact with the work clamp device 25 or the like in the laser processing apparatus 1. An easily deformable portion 39T is provided to prevent this impact from being transmitted to the elevating cylinder member 35 side.
A processing head device in a laser processing apparatus, characterized in that a part of the intermediate cylindrical member 39 is provided with: 2. The processing head device according to claim 1, wherein the easily deformable portion 39T of the intermediate cylinder member 39 is made of an elastic body.