JPS6110492U - Firing furnace equipped with oxygen concentration control - Google Patents
Firing furnace equipped with oxygen concentration controlInfo
- Publication number
- JPS6110492U JPS6110492U JP9584484U JP9584484U JPS6110492U JP S6110492 U JPS6110492 U JP S6110492U JP 9584484 U JP9584484 U JP 9584484U JP 9584484 U JP9584484 U JP 9584484U JP S6110492 U JPS6110492 U JP S6110492U
- Authority
- JP
- Japan
- Prior art keywords
- oxygen concentration
- concentration control
- firing furnace
- furnace equipped
- firing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の焼成炉の断面側面図、第２図はこの考案
の焼成炉の一実施例による焼成炉の断面側面図である。
図において、１は炉、２はベルト、３は流量コントロー
ラ、４は排気ダクト、５は酸素濃度検出器である。
各図中の同一符号は同一又は相当部分を示す。FIG. 1 is a cross-sectional side view of a conventional firing furnace, and FIG. 2 is a cross-sectional side view of a firing furnace according to an embodiment of the firing furnace of this invention. In the figure, 1 is a furnace, 2 is a belt, 3 is a flow rate controller, 4 is an exhaust duct, and 5 is an oxygen concentration detector. The same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
内の酸素濃度制御を備えた焼成炉。A firing furnace equipped with oxygen concentration control inside the furnace when firing conductors and resistors for hybrid integrated circuits.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9584484U JPS6110492U (en) | 1984-06-25 | 1984-06-25 | Firing furnace equipped with oxygen concentration control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9584484U JPS6110492U (en) | 1984-06-25 | 1984-06-25 | Firing furnace equipped with oxygen concentration control |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6110492U true JPS6110492U (en) | 1986-01-22 |
Family
ID=30655089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9584484U Pending JPS6110492U (en) | 1984-06-25 | 1984-06-25 | Firing furnace equipped with oxygen concentration control |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6110492U (en) |
-
1984
- 1984-06-25 JP JP9584484U patent/JPS6110492U/en active Pending
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