JPS60131014U

JPS60131014U - Gas flow control device

Info

Publication number: JPS60131014U
Application number: JP1681284U
Authority: JP
Inventors: 稔空岡; 松田　伸一郎
Original assignee: 株式会社日立製作所
Priority date: 1984-02-10
Filing date: 1984-02-10
Publication date: 1985-09-02

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は、真空処理装置の構成を示すブロック図、第２
図は、従来のガス流量制御装置の構成を示すブロック図
、第３図は、本考案によるガス流量制御装置の構成の一
実施例を示すブロック図である。４１・・・高周波電源、５０・・・センサ一部、５１・
・・バイパス部、５２・・・制御部、５３・・・制御回
路、５４′・・・フィルタ。Figure 1 is a block diagram showing the configuration of the vacuum processing apparatus, Figure 2 is a block diagram showing the configuration of the vacuum processing apparatus;
FIG. 3 is a block diagram showing the configuration of a conventional gas flow rate control device, and FIG. 3 is a block diagram showing an example of the configuration of the gas flow rate control device according to the present invention. 41... High frequency power supply, 50... Part of sensor, 51.
... Bypass section, 52... Control section, 53... Control circuit, 54'... Filter.

Claims

[Scope of utility model registration request]

In a device consisting of a part of a sensor that detects a gas flow rate, a bypass part that diverts gas to the part of the sensor, a control part that controls the gas flow rate, and a control circuit that controls the control part, A gas flow rate control device comprising a filter formed of a heating element and connected to a power source.