JPS61103604U - - Google Patents

Info

Publication number
JPS61103604U
JPS61103604U JP18877284U JP18877284U JPS61103604U JP S61103604 U JPS61103604 U JP S61103604U JP 18877284 U JP18877284 U JP 18877284U JP 18877284 U JP18877284 U JP 18877284U JP S61103604 U JPS61103604 U JP S61103604U
Authority
JP
Japan
Prior art keywords
servo
diaphragm
main
outlet side
fluid pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18877284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353294Y2 (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18877284U priority Critical patent/JPH0353294Y2/ja
Publication of JPS61103604U publication Critical patent/JPS61103604U/ja
Application granted granted Critical
Publication of JPH0353294Y2 publication Critical patent/JPH0353294Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Control Of Fluid Pressure (AREA)
JP18877284U 1984-12-14 1984-12-14 Expired JPH0353294Y2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18877284U JPH0353294Y2 (US20090163788A1-20090625-C00002.png) 1984-12-14 1984-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18877284U JPH0353294Y2 (US20090163788A1-20090625-C00002.png) 1984-12-14 1984-12-14

Publications (2)

Publication Number Publication Date
JPS61103604U true JPS61103604U (US20090163788A1-20090625-C00002.png) 1986-07-01
JPH0353294Y2 JPH0353294Y2 (US20090163788A1-20090625-C00002.png) 1991-11-21

Family

ID=30746235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18877284U Expired JPH0353294Y2 (US20090163788A1-20090625-C00002.png) 1984-12-14 1984-12-14

Country Status (1)

Country Link
JP (1) JPH0353294Y2 (US20090163788A1-20090625-C00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6472214A (en) * 1987-09-12 1989-03-17 Smc Corp Vacuum pressure regulator
JP2005317515A (ja) * 2004-03-31 2005-11-10 Canon Inc バルブおよびそれを用いた燃料電池

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6472214A (en) * 1987-09-12 1989-03-17 Smc Corp Vacuum pressure regulator
JP2005317515A (ja) * 2004-03-31 2005-11-10 Canon Inc バルブおよびそれを用いた燃料電池
JP4544525B2 (ja) * 2004-03-31 2010-09-15 キヤノン株式会社 バルブおよびそれを用いた燃料電池

Also Published As

Publication number Publication date
JPH0353294Y2 (US20090163788A1-20090625-C00002.png) 1991-11-21

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