JPS61102828U - - Google Patents

Info

Publication number

JPS61102828U

JPS61102828U JP18608284U JP18608284U JPS61102828U JP S61102828 U JPS61102828 U JP S61102828U JP 18608284 U JP18608284 U JP 18608284U JP 18608284 U JP18608284 U JP 18608284U JP S61102828 U JPS61102828 U JP S61102828U

Authority

JP

Japan

Prior art keywords

region

cantilever

cantilever beam

resistance

semiconductor

Prior art date

1984-12-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
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• 239000000758 substrate Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 229910052581 Si3N4 Inorganic materials 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1

Cited By (1)