JPS61102044U - - Google Patents
Info
- Publication number
- JPS61102044U JPS61102044U JP18678684U JP18678684U JPS61102044U JP S61102044 U JPS61102044 U JP S61102044U JP 18678684 U JP18678684 U JP 18678684U JP 18678684 U JP18678684 U JP 18678684U JP S61102044 U JPS61102044 U JP S61102044U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer transfer
- wafer chuck
- transfer device
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984186786U JPH0610685Y2 (ja) | 1984-12-11 | 1984-12-11 | ウエハ移し換え装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984186786U JPH0610685Y2 (ja) | 1984-12-11 | 1984-12-11 | ウエハ移し換え装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61102044U true JPS61102044U (bs) | 1986-06-28 |
| JPH0610685Y2 JPH0610685Y2 (ja) | 1994-03-16 |
Family
ID=30744255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984186786U Expired - Lifetime JPH0610685Y2 (ja) | 1984-12-11 | 1984-12-11 | ウエハ移し換え装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610685Y2 (bs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112635377A (zh) * | 2020-12-25 | 2021-04-09 | 上海广川科技有限公司 | 一种等间距调节模组 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61131465A (ja) * | 1984-11-30 | 1986-06-19 | Tomuko:Kk | ウエハ移換え装置 |
-
1984
- 1984-12-11 JP JP1984186786U patent/JPH0610685Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61131465A (ja) * | 1984-11-30 | 1986-06-19 | Tomuko:Kk | ウエハ移換え装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112635377A (zh) * | 2020-12-25 | 2021-04-09 | 上海广川科技有限公司 | 一种等间距调节模组 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610685Y2 (ja) | 1994-03-16 |