JPS61100874U - - Google Patents
Info
- Publication number
- JPS61100874U JPS61100874U JP18641584U JP18641584U JPS61100874U JP S61100874 U JPS61100874 U JP S61100874U JP 18641584 U JP18641584 U JP 18641584U JP 18641584 U JP18641584 U JP 18641584U JP S61100874 U JPS61100874 U JP S61100874U
- Authority
- JP
- Japan
- Prior art keywords
- implantation
- ion
- sections
- ion beam
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000002513 implantation Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18641584U JPS61100874U (ko) | 1984-12-08 | 1984-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18641584U JPS61100874U (ko) | 1984-12-08 | 1984-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61100874U true JPS61100874U (ko) | 1986-06-27 |
Family
ID=30743879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18641584U Pending JPS61100874U (ko) | 1984-12-08 | 1984-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61100874U (ko) |
-
1984
- 1984-12-08 JP JP18641584U patent/JPS61100874U/ja active Pending